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公开(公告)号:US10938375B2
公开(公告)日:2021-03-02
申请号:US15690482
申请日:2017-08-30
Applicant: Murata Manufacturing Co., Ltd.
Inventor: Daisuke Nakamura , Toshio Nishimura , Ville Kaajakari
Abstract: A resonator that includes a rectangular vibrating portion having first and second pairs of sides that provides contour vibration. A frame surrounds a periphery of the vibrating portion and a first holding unit between the frame and one of the first sides and includes a first arm substantially in parallel to the vibrating portion, multiple second arms connecting the first arm with the vibrating portion, and a third arm connecting the first arm with the frame. A first connection line is on the first arm; a first terminal is on the frame; three or more electrodes are on the vibrating portion; and multiple first extended lines are on the second arms and connect first and second electrodes with the first connection line. The first extended lines are connected to the first connection line, which is electrically connected to the first terminal.
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公开(公告)号:US20170222621A1
公开(公告)日:2017-08-03
申请号:US15483161
申请日:2017-04-10
Applicant: Murata Manufacturing Co., Ltd.
Inventor: Toshio Nishimura , Yuichi Goto , Daisuke Nakamura
Abstract: A resonator includes a support frame, a rectangular vibrating plate that performs contour vibration in a predetermined direction, and two pairs of support arms. The vibrating plate includes four vibration regions arranged in a row in the lengthwise direction and electrodes disposed in the vibration regions. Each of the vibration regions vibrate with a phase opposite to phases with which the adjacent vibration regions vibrate upon excitation. A center line of a pair of the electrodes in the lengthwise direction is offset from a center line, in the lengthwise direction, of a corresponding vibration region that includes the electrode disposed thereon.
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公开(公告)号:US20160322953A1
公开(公告)日:2016-11-03
申请号:US15206647
申请日:2016-07-11
Applicant: Murata Manufacturing Co., Ltd.
Inventor: KEISUKE TAKEYAMA , Daisuke Nakamura , Eitaro Kameda , Hiroaki Kaida
CPC classification number: H03H9/02244 , H03H3/0077 , H03H3/02 , H03H3/04 , H03H9/0504 , H03H9/17 , H03H9/171 , H03H2003/027 , H03H2003/0442 , H03H2009/02173 , H03H2009/155
Abstract: A piezoelectric vibrator that includes a piezoelectric film with a pair of electrodes disposed on opposing sides of the piezoelectric film. Moreover, the vibrator includes first and second adjustment films with the first adjustment film covering the first surface of the piezoelectric film in a first region and the second adjustment film covering the first surface of the piezoelectric film in a second region that is different from the first region. Moreover, the second region of the piezoelectric film has a greater displacement than the first region when the piezoelectric vibrator vibrates.
Abstract translation: 一种压电振动器,其包括具有设置在所述压电膜的相对侧上的一对电极的压电膜。 此外,振动器包括第一和第二调节膜,其中第一调节膜在第一区域中覆盖压电膜的第一表面,并且第二调节膜在与第一区域不同的第二区域中覆盖压电膜的第一表面 地区。 此外,当压电振动器振动时,压电膜的第二区域具有比第一区域更大的位移。
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公开(公告)号:US10530332B2
公开(公告)日:2020-01-07
申请号:US15453173
申请日:2017-03-08
Applicant: Murata Manufacturing Co., Ltd.
Inventor: Daisuke Nakamura , Hiroshi Nakatani
Abstract: A resonator is provided that suppresses vibration of a retainer caused by undesired vibration of a vibrating portion and also achieves size reduction. Specifically, the resonator includes a vibrating member that includes a semiconductor layer, a first piezoelectric film formed on the semiconductor layer, and a first upper electrode formed on the first piezoelectric film. Moreover, a retainer is provided to retain the vibrating member such that the vibrating portion can vibrate and one or more coupling members are provided to couple the vibrating member to the retainer. Finally, the resonator includes a vibration suppressing member that includes a second piezoelectric film formed on the retainer and a second upper electrode formed on the second piezoelectric film.
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公开(公告)号:US20170201226A1
公开(公告)日:2017-07-13
申请号:US15472576
申请日:2017-03-29
Applicant: Murata Manufacturing Co., Ltd.
Inventor: Ryota Kawai , Daisuke Nakamura , Toshio Nishimura
CPC classification number: H03H9/02448 , H03H9/02259 , H03H9/10 , H03H9/1057 , H03H9/173 , H03H9/2405 , H03H2009/155 , H03H2009/241
Abstract: A piezoelectric vibrator is a piezoelectric vibrator including a vibration portion. The vibration portion has an n-type Si layer which is a degenerated semiconductor and which has a resistivity of not less than 0.5 mΩcm and not greater than 1.2 mΩcm and preferably not greater than 0.9 mΩcm.
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公开(公告)号:US10778182B2
公开(公告)日:2020-09-15
申请号:US15695505
申请日:2017-09-05
Applicant: Murata Manufacturing Co., Ltd.
Inventor: Daisuke Nakamura , Toshio Nishimura , Ville Kaajakari
Abstract: A resonator including a vibrating portion with first and second electrodes and a piezoelectric film formed therebetween. Moreover, a frame surrounds the vibrating portion with a pair of holding units opposite to each other and connecting the vibrating portion with the frame. An extended electrode extends from the holder to the holding unit and either the first or second electrode extends to the holding unit, and is connected to the extended electrode. Furthermore, the resonator includes an electrical resistance value per unit area of the extended electrode that is smaller than an electrical resistance value per unit area of the first electrode or the second electrode that extends to the holding unit.
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公开(公告)号:US10707831B2
公开(公告)日:2020-07-07
申请号:US15483161
申请日:2017-04-10
Applicant: Murata Manufacturing Co., Ltd.
Inventor: Toshio Nishimura , Yuichi Goto , Daisuke Nakamura
IPC: H01L41/053 , H01L41/047 , H01L41/09 , H03H9/13 , H03H9/02 , H03H9/24 , H03H9/10 , H03H9/05 , H03H9/17
Abstract: A resonator includes a support frame, a rectangular vibrating plate that performs contour vibration in a predetermined direction, and two pairs of support arms. The vibrating plate includes four vibration regions arranged in a row in the lengthwise direction and electrodes disposed in the vibration regions. Each of the vibration regions vibrate with a phase opposite to phases with which the adjacent vibration regions vibrate upon excitation. A center line of a pair of the electrodes in the lengthwise direction is offset from a center line, in the lengthwise direction, of a corresponding vibration region that includes the electrode disposed thereon.
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公开(公告)号:US10333486B2
公开(公告)日:2019-06-25
申请号:US15206647
申请日:2016-07-11
Applicant: Murata Manufacturing Co., Ltd.
Inventor: Keisuke Takeyama , Daisuke Nakamura , Eitaro Kameda , Hiroaki Kaida
Abstract: A piezoelectric vibrator that includes a piezoelectric film with a pair of electrodes disposed on opposing sides of the piezoelectric film. Moreover, the vibrator includes first and second adjustment films with the first adjustment film covering the first surface of the piezoelectric film in a first region and the second adjustment film covering the first surface of the piezoelectric film in a second region that is different from the first region. Moreover, the second region of the piezoelectric film has a greater displacement than the first region when the piezoelectric vibrator vibrates.
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公开(公告)号:US20180054180A1
公开(公告)日:2018-02-22
申请号:US15690482
申请日:2017-08-30
Applicant: Murata Manufacturing Co., Ltd.
Inventor: Daisuke Nakamura , Toshio Nishimura , Ville Kaajakari
CPC classification number: H03H9/0595 , H03H9/02275 , H03H9/1057 , H03H9/132 , H03H9/174 , H03H9/2452 , H03H2009/02503 , H03H2009/155
Abstract: A resonator that includes a rectangular vibrating portion having first and second pairs of sides that provides contour vibration. A frame surrounds a periphery of the vibrating portion and a first holding unit between the frame and one of the first sides and includes a first arm substantially in parallel to the vibrating portion, multiple second arms connecting the first arm with the vibrating portion, and a third arm connecting the first arm with the frame. A first connection line is on the first arm; a first terminal is on the frame; three or more electrodes are on the vibrating portion; and multiple first extended lines are on the second arms and connect first and second electrodes with the first connection line. The first extended lines are connected to the first connection line, which is electrically connected to the first terminal.
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公开(公告)号:US11196403B2
公开(公告)日:2021-12-07
申请号:US15472576
申请日:2017-03-29
Applicant: Murata Manufacturing Co., Ltd.
Inventor: Ryota Kawai , Daisuke Nakamura , Toshio Nishimura
Abstract: A piezoelectric vibrator is a piezoelectric vibrator including a vibration portion. The vibration portion has an n-type Si layer which is a degenerated semiconductor and which has a resistivity of not less than 0.5 mΩcm and not greater than 1.2 mΩcm and preferably not greater than 0.9 mΩcm.
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