Invention Grant
- Patent Title: Methods of forming an apparatus including device structures including pillar structures, and related memory devices, and electronic systems
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Application No.: US16729076Application Date: 2019-12-27
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Publication No.: US11201154B2Publication Date: 2021-12-14
- Inventor: Song Guo , Sanh D. Tang , Shen Hu , Yan Li , Nicholas R. Tapias
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: TraskBritt
- Main IPC: G11C11/24
- IPC: G11C11/24 ; H01L27/108 ; G11C11/408

Abstract:
A method of forming an apparatus comprises forming pillar structures extending from a base material. Upper portions of the pillar structures may exhibit a lateral width that is relatively greater than a lateral width of lower portions of the pillar structures. The method also comprises forming access lines laterally adjacent to the lower portions of the pillar structures and forming digit lines above upper surfaces of the pillar structures. Memory devices and electronic systems are also described.
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