Invention Grant
- Patent Title: Semiconductor storage device
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Application No.: US17008236Application Date: 2020-08-31
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Publication No.: US11201171B2Publication Date: 2021-12-14
- Inventor: Sumiko Domae , Daisaburo Takashima
- Applicant: KIOXIA CORPORATION
- Applicant Address: JP Tokyo
- Assignee: KIOXIA CORPORATION
- Current Assignee: KIOXIA CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Kim & Stewart LLP
- Priority: JPJP2019-168736 20190917
- Main IPC: G11C7/06
- IPC: G11C7/06 ; H01L27/11597 ; H01L27/11592 ; H01L27/11509 ; H01L29/78 ; H01L29/66 ; G11C7/18 ; H01L27/11514

Abstract:
A semiconductor storage device includes a stacked body and a columnar body. The stacked body includes a plurality of conductive layers spaced apart from each other in a stacking direction. The columnar body penetrates the stacked body in the stacking direction. The columnar body includes a columnar ferroelectric film, a semiconductor film disposed between the ferroelectric film and the conductive layers, and an insulating film disposed between the semiconductor film and the conductive layers.
Public/Granted literature
- US20210082959A1 SEMICONDUCTOR STORAGE DEVICE Public/Granted day:2021-03-18
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