Invention Grant
- Patent Title: Semiconductor memory device having a plurality of memory cells each having a phase change material
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Application No.: US16558822Application Date: 2019-09-03
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Publication No.: US11201191B2Publication Date: 2021-12-14
- Inventor: Atsushi Kawasumi , Tsuneo Inaba
- Applicant: TOSHIBA MEMORY CORPORATION
- Applicant Address: JP Tokyo
- Assignee: TOSHIBA MEMORY CORPORATION
- Current Assignee: TOSHIBA MEMORY CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Kim & Stewart LLP
- Priority: JPJP2019-048620 20190315
- Main IPC: H01L47/00
- IPC: H01L47/00 ; H01L27/24 ; H01L45/00 ; H01L27/10 ; H01L21/822

Abstract:
A semiconductor memory device includes a first wiring extending in a first direction, a second wiring above the first wiring and extending in a second direction, first and second memory cells electrically connected in parallel between the first and second wirings and each including a phase change material, a first insulating film on a side portion of the first cell facing the second cell in the second direction, a third wiring above the second wiring and extending in the second direction, a fourth wiring above the third wiring and extending in the first direction, third and fourth memory cells electrically connected between the third and fourth wirings in parallel and each including a phase change material, and a second insulating film on a side of the third cell facing the fourth cell in the second direction. The first film has a higher thermal insulation capacity than the second film.
Public/Granted literature
- US20200295087A1 SEMICONDUCTOR MEMORY DEVICE Public/Granted day:2020-09-17
Information query
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