- 专利标题： Generalized organic vapor jet depositor capable of high resolution printing and method for OVJP printing
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申请号： US15981482申请日： 2018-05-16
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公开(公告)号： US11201288B2公开(公告)日： 2021-12-14
- 发明人: Xin Xu , Gregory McGraw , William E. Quinn
- 申请人： Universal Display Corporation
- 申请人地址： US NJ Ewing
- 专利权人： Universal Display Corporation
- 当前专利权人： Universal Display Corporation
- 当前专利权人地址： US NJ Ewing
- 代理机构： Butzel Long
- 主分类号： H01L51/00
- IPC分类号： H01L51/00 ; B41J2/14 ; C23C14/22 ; C23C14/12 ; C23C14/04 ; B41J2/04 ; B05B12/18 ; B41J2/045 ; C23C16/455 ; H01L27/32 ; H01L51/50 ; H01L51/52 ; H05B33/10 ; H05B33/12
摘要：
OVJP depositors and techniques for using the same are provided, in which the in-substrate plane velocity of the delivery and confinement flows are both nonzero and parallel to each other across the boundary between the two. These configurations provide improved material utilization efficiency and relaxed fly height tolerances, while achieving acceptable printing resolution and feature uniformity.
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