- 专利标题： Method and system for automatic zone axis alignment
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申请号： US16730998申请日： 2019-12-30
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公开(公告)号： US11211222B2公开(公告)日： 2021-12-28
- 发明人: John J. Flanagan , Nathaniel Kurtz , Ashley Tilson , Phillip Parker
- 申请人： FEI Company
- 申请人地址： US OR Hillsboro
- 专利权人： FEI Company
- 当前专利权人： FEI Company
- 当前专利权人地址： US OR Hillsboro
- 主分类号： H01J37/244
- IPC分类号： H01J37/244 ; H01J37/28 ; G01N23/20058 ; H01J37/22
摘要：
Automatic alignment of the zone axis of a sample and a charged particle beam is achieved based on a diffraction pattern of the sample. An area corresponding to the Laue circle is segmented using a trained network. The sample is aligned with the charged particle beam by tilting the sample with a zone axis tilt determined based on the segmented area.
公开/授权文献
- US20210202205A1 METHOD AND SYSTEM FOR AUTOMATIC ZONE AXIS ALIGNMENT 公开/授权日：2021-07-01
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