Invention Grant
- Patent Title: Multi-object capable loadlock system
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Application No.: US16923903Application Date: 2020-07-08
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Publication No.: US11211269B2Publication Date: 2021-12-28
- Inventor: Andrew Paul Harbert , Michael C Kuchar , Nicholas Michael Bergantz , Leon Volfovski , Sivakumar Ramalingam , Karuppasamy Muthukamatchi , Douglas R McAllister
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Lowenstein Sandler LLP
- Priority: IN201941029137 20190719
- Main IPC: H01L21/67
- IPC: H01L21/67 ; H01L21/687 ; H01L21/677 ; H01L21/673

Abstract:
A method includes receiving, by a first loadlock chamber of the loadlock system, a first object from a factory interface via a first opening. The first object is transferred into the first loadlock chamber via a first robot arm. The factory interface is at a first state. The first loadlock chamber is configured to receive different types of objects. The method further includes sealing a first loadlock door against the first opening to create a first sealed environment at the first state in the first loadlock chamber and causing the first sealed environment of the first loadlock chamber to be changed to a second state. The method further includes actuating a second loadlock door to provide a second opening between the first loadlock chamber and a transfer chamber. The first object is to be transferred from the first loadlock chamber to the transfer chamber via a second robot arm.
Public/Granted literature
- US20210020476A1 MULTI-OBJECT CAPABLE LOADLOCK SYSTEM Public/Granted day:2021-01-21
Information query
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