公开(公告)号：US20210020476A1

公开(公告)日：2021-01-21

申请号：US16923903

申请日：2020-07-08

Applicant: Applied Materials, Inc.

Inventor： Andrew Paul Harbert ,  Michael C. Kuchar ,  Nicholas Michael Bergantz ,  Leon Volfovski ,  Sivakumar Ramalingam ,  Karuppasamy Muthukamatchi ,  Douglas R. McAllister

IPC: H01L21/67 ,  H01L21/687 ,  H01L21/677 ,  H01L21/673

Abstract: A method includes receiving, by a first loadlock chamber of the loadlock system, a first object from a factory interface via a first opening. The first object is transferred into the first loadlock chamber via a first robot arm. The factory interface is at a first state. The first loadlock chamber is configured to receive different types of objects. The method further includes sealing a first loadlock door against the first opening to create a first sealed environment at the first state in the first loadlock chamber and causing the first sealed environment of the first loadlock chamber to be changed to a second state. The method further includes actuating a second loadlock door to provide a second opening between the first loadlock chamber and a transfer chamber. The first object is to be transferred from the first loadlock chamber to the transfer chamber via a second robot arm.

公开(公告)号：US11211269B2

公开(公告)日：2021-12-28

申请号：US16923903

申请日：2020-07-08

Applicant: Applied Materials, Inc.

Inventor： Andrew Paul Harbert ,  Michael C Kuchar ,  Nicholas Michael Bergantz ,  Leon Volfovski ,  Sivakumar Ramalingam ,  Karuppasamy Muthukamatchi ,  Douglas R McAllister

IPC: H01L21/67 ,  H01L21/687 ,  H01L21/677 ,  H01L21/673

Abstract: A method includes receiving, by a first loadlock chamber of the loadlock system, a first object from a factory interface via a first opening. The first object is transferred into the first loadlock chamber via a first robot arm. The factory interface is at a first state. The first loadlock chamber is configured to receive different types of objects. The method further includes sealing a first loadlock door against the first opening to create a first sealed environment at the first state in the first loadlock chamber and causing the first sealed environment of the first loadlock chamber to be changed to a second state. The method further includes actuating a second loadlock door to provide a second opening between the first loadlock chamber and a transfer chamber. The first object is to be transferred from the first loadlock chamber to the transfer chamber via a second robot arm.