Invention Grant
- Patent Title: Electronic apparatus with an oxide-only tunneling structure by a select gate tier, and related methods
-
Application No.: US16542061Application Date: 2019-08-15
-
Publication No.: US11211399B2Publication Date: 2021-12-28
- Inventor: Ugo Russo , Chris M. Carlson
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: TraskBritt
- Main IPC: H01L27/11582
- IPC: H01L27/11582 ; H01L27/1157 ; H01L21/28 ; G11C5/06

Abstract:
A vertical structure extends through a tiered structure of alternating conductive and insulative materials. The vertical structure includes a channel structure and a tunneling structure. At least one of the conductive materials of the tiered structure provides a select gate tier (e.g., including a control gate for a select gate drain (SGD) transistor). Adjacent the select gate tier of the tiered structure, the tunneling structure consists of or consists essentially of an oxide-only material. Adjacent the word line tiers of the tiered structure, the tunneling structure comprises at least one material that is other than an oxide-only material, such as a nitride or oxynitride. The oxide-only material adjacent the select gate tier may inhibit unintentional loss of charge from a neighboring charge storage structure, which may improve the stability of the threshold voltage (Vth) of the select gate tier.
Public/Granted literature
- US20210050363A1 ELECTRONIC APPARATUS WITH AN OXIDE-ONLY TUNNELING STRUCTURE BY A SELECT GATE TIER, AND RELATED METHODS Public/Granted day:2021-02-18
Information query
IPC分类: