Vertical intercalation device for neuromorphic computing
Abstract:
Vertically stacked memory devices and methods of manufacture are provided. The structures include a substrate stack including a first row of horizontal electrodes disposed over a first insulating layer and first insulating layer disposed over a substrate. The substrate stack further includes a second row of horizontal electrodes separated from the first row of horizontal electrodes by a second insulating layer, and the first row of horizontal electrodes is form over and substantially parallel to the second row of horizontal electrodes. A third insulating layer is formed over the second row of horizontal electrodes. A plurality of vertical gate trenches formed through the third insulating layer, the second row of horizontal electrodes, the second insulating layer, the first row of horizontal electrodes and the first insulating layer. The plurality of vertical gate trenches filled with a layer of channel material, a layer of electrolyte material and filled with a metal.
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