SCALED NANOTUBE ELECTRODE FOR LOW POWER MULTISTAGE ATOMIC SWITCH

    公开(公告)号:US20200136034A1

    公开(公告)日:2020-04-30

    申请号:US16666471

    申请日:2019-10-29

    IPC分类号: H01L45/00

    摘要: A method of forming a memory device that includes depositing a first dielectric material within a trench of composed of a second dielectric material; positioning a nanotube within the trench using chemical recognition to the first dielectric material; depositing a dielectric for cation transportation within the trench on the nanotube; and forming a second electrode on the dielectric for cation transportation, wherein the second electrode is composed of a metal.