An optical waveguide element includes an optical waveguide which is formed on one surface of a substrate, an incidence part for light to be incident on the optical waveguide or an emission part for emitting light from the optical waveguide which is disposed in an end portion of the substrate, and a dielectric film which is formed on the optical waveguide of at least one of the incidence part and the emission part, and the vicinity thereof. Regarding the dielectric film, dielectric films including a dielectric film formed of a first material having an index of refraction higher than an index of refraction of the substrate and a dielectric film formed of a second material having an index of refraction lower than the index of refraction of the substrate are alternately laminated.