发明授权
- 专利标题: Unidirectional self-aligned gate endcap (SAGE) architectures with gate-orthogonal walls
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申请号: US15941647申请日: 2018-03-30
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公开(公告)号: US11217582B2公开(公告)日: 2022-01-04
- 发明人: Walid M. Hafez , Sridhar Govindaraju , Mark Liu , Szuya S. Liao , Chia-Hong Jan , Nick Lindert , Christopher Kenyon , Sairam Subramanian
- 申请人: Intel Corporation
- 申请人地址: US CA Santa Clara
- 专利权人: Intel Corporation
- 当前专利权人: Intel Corporation
- 当前专利权人地址: US CA Santa Clara
- 代理机构: Schwabe, Williamson & Wyatt P.C.
- 主分类号: H01L27/088
- IPC分类号: H01L27/088 ; H01L29/66 ; H01L23/528 ; H01L29/06 ; H01L21/8234
摘要:
Unidirectional self-aligned gate endcap (SAGE) architectures with gate-orthogonal walls, and methods of fabricating unidirectional self-aligned gate endcap (SAGE) architectures with gate-orthogonal walls, are described. In an example, integrated circuit structure includes a first semiconductor fin having a cut along a length of the first semiconductor fin. A second semiconductor fin has a cut along a length of the second semiconductor fin. A gate endcap isolation structure is between the first semiconductor fin and the second semiconductor fin. The gate endcap isolation structure has a substantially uniform width along the lengths of the first and second semiconductor fins.
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