Invention Grant
- Patent Title: Unidirectional self-aligned gate endcap (SAGE) architectures with gate-orthogonal walls
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Application No.: US15941647Application Date: 2018-03-30
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Publication No.: US11217582B2Publication Date: 2022-01-04
- Inventor: Walid M. Hafez , Sridhar Govindaraju , Mark Liu , Szuya S. Liao , Chia-Hong Jan , Nick Lindert , Christopher Kenyon , Sairam Subramanian
- Applicant: Intel Corporation
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Schwabe, Williamson & Wyatt P.C.
- Main IPC: H01L27/088
- IPC: H01L27/088 ; H01L29/66 ; H01L23/528 ; H01L29/06 ; H01L21/8234

Abstract:
Unidirectional self-aligned gate endcap (SAGE) architectures with gate-orthogonal walls, and methods of fabricating unidirectional self-aligned gate endcap (SAGE) architectures with gate-orthogonal walls, are described. In an example, integrated circuit structure includes a first semiconductor fin having a cut along a length of the first semiconductor fin. A second semiconductor fin has a cut along a length of the second semiconductor fin. A gate endcap isolation structure is between the first semiconductor fin and the second semiconductor fin. The gate endcap isolation structure has a substantially uniform width along the lengths of the first and second semiconductor fins.
Public/Granted literature
- US20190304971A1 UNIDIRECTIONAL SELF-ALIGNED GATE ENDCAP (SAGE) ARCHITECTURES WITH GATE-ORTHOGONAL WALLS Public/Granted day:2019-10-03
Information query
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