Piezoelectric drive device, robot, and printer
Abstract:
A piezoelectric drive device has a first piezoelectric vibrator and a second piezoelectric vibrator each include a vibrating portion and a distal end portion in which the distal end portion make elliptic motion by stretching vibration and flexural vibration of the vibrating portion, a driven member driven by the elliptic motion of the distal end portion, a drive signal generation circuit that outputs stretching vibration drive signals to the first piezoelectric vibrator and the second piezoelectric vibrator, a first boosting circuit provided between the first piezoelectric vibrator and the drive signal generation circuit, a second boosting circuit provided between the second piezoelectric vibrator and the drive signal generation circuit, and a control circuit that controls boosting amounts of the stretching vibration drive signals.
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