Invention Grant
- Patent Title: Heat treatment apparatus
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Application No.: US16711527Application Date: 2019-12-12
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Publication No.: US11234296B2Publication Date: 2022-01-25
- Inventor: Masayoshi Masunaga , Yutaka Sasaki
- Applicant: Tokyo Electron Limited
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo
- Agency: Abelman, Frayne & Schwab
- Priority: JPJP2018-235169 20181217
- Main IPC: H05B3/68
- IPC: H05B3/68 ; H05B1/02 ; H01L21/67

Abstract:
A heat treatment apparatus includes a processing container extended in a vertical direction; a heater provided around the processing container; a temperature sensor provided along a longitudinal direction of the processing container either in the processing container or in a space between the processing container and the heater; and a pair of first partitions provided in the space across a half line that extends from a central axis of the processing container and passes through the temperature sensor, and extending along the longitudinal direction of the processing container.
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