Invention Grant
- Patent Title: Gate-all-around field effect transistor having multiple threshold voltages
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Application No.: US16745100Application Date: 2020-01-16
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Publication No.: US11245020B2Publication Date: 2022-02-08
- Inventor: Ruqiang Bao , Michael A. Guillorn , Terence Hook , Robert R. Robison , Reinaldo Vega , Tenko Yamashita
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Tutunjan & Bitetto, P.C.
- Agent Erik Johnson
- Main IPC: H01L29/423
- IPC: H01L29/423 ; H01L29/66 ; H01L29/78 ; H01L29/49 ; H01L29/06 ; H01L29/775 ; B82Y10/00 ; H01L29/786

Abstract:
One example of an apparatus includes a conducting channel region. The conducting channel region includes a plurality of epitaxially grown, in situ doped conducting channels arranged in a spaced apart relation relative to each other. A source positioned at a first end of the conducting channel region, and a drain positioned at a second end of the conducting channel region. A gate surrounds all sides of the conducting channel region and fills in spaces between the plurality of epitaxially grown, in situ doped conducting channels.
Public/Granted literature
- US20200258995A1 GATE-ALL-AROUND FIELD EFFECT TRANSISTOR HAVING MULTIPLE THRESHOLD VOLTAGES Public/Granted day:2020-08-13
Information query
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