发明授权
- 专利标题: MEMS gyroscope self-test using a technique for deflection of the sensing mobile mass
-
申请号: US16452967申请日: 2019-06-26
-
公开(公告)号: US11255670B2公开(公告)日: 2022-02-22
- 发明人: Yamu Hu , Deyou Fang , David Mcclure , Huantong Zhang , Naren K. Sahoo
- 申请人: STMicroelectronics, Inc.
- 申请人地址: US TX Coppell
- 专利权人: STMicroelectronics, Inc.
- 当前专利权人: STMicroelectronics, Inc.
- 当前专利权人地址: US TX Coppell
- 代理机构: Crowe & Dunlevy
- 主分类号: G01C19/5719
- IPC分类号: G01C19/5719 ; H04L27/38
摘要:
A microelectromechanical system (MEMS) gyroscope sensor has a sensing mass and a quadrature error compensation control loop for applying a force to the sensing mass to cancel quadrature error. To detect fault, the quadrature error compensation control loop is opened and an additional force is applied to produce a physical displacement of the sensing mass. A quadrature error resulting from the physical displacement of the sensing mass in response to the applied additional force is sensed. The sensed quadrature error is compared to an expected value corresponding to the applied additional force and a fault alert is generated if the comparison is not satisfied.
信息查询