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    MEMS gyroscope start-up process and circuit
    1.
    发明授权
    MEMS gyroscope start-up process and circuit 有权

    公开(公告)号：US11162790B2

    公开(公告)日：2021-11-02

    申请号：US16452813

    申请日：2019-06-26

    Applicant: STMicroelectronics, Inc.

    Inventor： Deyou Fang ,  Chao-Ming Tsai ,  Yamu Hu

    IPC: G01C19/5719 ,  G01C19/5607 ,  G01C19/5642 ,  G01C19/56 ,  G01C19/5649

    Abstract: A drive signal is applied to a MEMS gyroscope having several intrinsic resonant modes. Frequency and amplitude of mechanical oscillation in response to the drive signal is sensed. At startup, the drive signal frequency is set to a kicking frequency offset from a resonant frequency corresponding to a desired one of the intrinsic resonant modes. In response to sufficient sensed amplitude of mechanical oscillation at the kicking frequency, a frequency tracking process is engaged to control the frequency for the drive signal to sustain mechanical oscillation at the frequency of the desired one of the plurality of intrinsic resonant modes as the oscillation amplitude increases. When the increasing amplitude of the mechanical oscillation exceeds a threshold, a gain control process is used to exercise gain control over the applied drive signal so as to cause the amplitude of mechanical oscillation to match a further threshold. At that point start-up terminates.

    MEMS gyroscope control circuit
    2.
    发明授权
    MEMS gyroscope control circuit 有权

    公开(公告)号：US12111158B2

    公开(公告)日：2024-10-08

    申请号：US18136088

    申请日：2023-04-18

    Applicant: STMicroelectronics, Inc.

    Inventor： Deyou Fang ,  Chao-Ming Tsai ,  Milad Alwardi ,  Yamu Hu ,  David McClure

    IPC: G01C19/5726 ,  G01C19/5733 ,  G01C25/00

    CPC classification number: G01C19/5726 ,  G01C19/5733 ,  G01C25/005

    Abstract: A microelectromechanical system (MEMS) gyroscope includes a driving mass and a driving circuit that operates to drive the driving mass in a mechanical oscillation at a resonant drive frequency. An oscillator generates a system clock that is independent of and asynchronous to the resonant drive frequency. A clock generator circuit outputs a first clock and a second clock that are derived from the system clock. The drive loop of the driving circuit including an analog-to-digital converter (ADC) circuit that is clocked by the first clock and a digital signal processing (DSP) circuit that is clocked by the second clock.

    CANCELLATION OF NOISE DUE TO CAPACITANCE MISMATCH IN MEMS SENSORS
    4.
    发明申请
    CANCELLATION OF NOISE DUE TO CAPACITANCE MISMATCH IN MEMS SENSORS 审中-公开

    公开(公告)号：US20170227569A1

    公开(公告)日：2017-08-10

    申请号：US15019453

    申请日：2016-02-09

    Applicant: STMicroelectronics, Inc.

    Inventor： Milad Alwardi ,  Deyou Fang

    IPC: G01P15/125 ,  G01P15/08

    CPC classification number: G01P15/125 ,  G01C19/5776 ,  G01D5/2417 ,  G01R27/2605

    Abstract: Disclosed herein is a device including a MEMS sensor configured to generate a first differential capacitance representing a change in capacitance from a first original sensing capacitance value and a second differential capacitance representing a change in capacitance from a second original sensing capacitance value, with the first and second original sensing capacitance values being mismatched. A compensation circuit is configured to generate outputs for compensating the first and second differential capacitances for the mismatch. A capacitance to voltage converter receives the first and second differential capacitances and the outputs of the compensation circuit as input and generates an output voltage as a function thereof.

    MEMS gyroscope control circuit
    5.
    发明授权
    MEMS gyroscope control circuit 有权

    公开(公告)号：US11175138B2

    公开(公告)日：2021-11-16

    申请号：US16452850

    申请日：2019-06-26

    Applicant: STMicroelectronics, Inc.

    Inventor： Deyou Fang ,  Chao-Ming Tsai ,  Milad Alwardi ,  Yamu Hu ,  David McClure

    IPC: G01C19/5726 ,  G01C25/00 ,  G01C19/5733

    Abstract: A microelectromechanical system (MEMS) gyroscope includes a driving mass and a driving circuit that operates to drive the driving mass in a mechanical oscillation at a resonant drive frequency. An oscillator generates a system clock that is independent of and asynchronous to the resonant drive frequency. A clock generator circuit outputs a first clock and a second clock that are derived from the system clock. The drive loop of the driving circuit including an analog-to-digital converter (ADC) circuit that is clocked by the first clock and a digital signal processing (DSP) circuit that is clocked by the second clock.

    Cancellation of noise due to capacitance mismatch in MEMS sensors
    7.
    发明授权
    Cancellation of noise due to capacitance mismatch in MEMS sensors 有权

    公开(公告)号：US10274510B2

    公开(公告)日：2019-04-30

    申请号：US15019453

    申请日：2016-02-09

    Applicant: STMicroelectronics, Inc.

    Inventor： Milad Alwardi ,  Deyou Fang

    IPC: G01P15/125 ,  G01R27/26 ,  G01D5/241 ,  G01C19/5776

    Abstract: Disclosed herein is a device including a MEMS sensor configured to generate a first differential capacitance representing a change in capacitance from a first original sensing capacitance value and a second differential capacitance representing a change in capacitance from a second original sensing capacitance value, with the first and second original sensing capacitance values being mismatched. A compensation circuit is configured to generate outputs for compensating the first and second differential capacitances for the mismatch. A capacitance to voltage converter receives the first and second differential capacitances and the outputs of the compensation circuit as input and generates an output voltage as a function thereof.

    MEMS gyroscope self-test using a technique for deflection of the sensing mobile mass
    9.
    发明授权
    MEMS gyroscope self-test using a technique for deflection of the sensing mobile mass 有权

    公开(公告)号：US11255670B2

    公开(公告)日：2022-02-22

    申请号：US16452967

    申请日：2019-06-26

    Applicant: STMicroelectronics, Inc.

    Inventor： Yamu Hu ,  Deyou Fang ,  David Mcclure ,  Huantong Zhang ,  Naren K. Sahoo

    IPC: G01C19/5719 ,  H04L27/38

    Abstract: A microelectromechanical system (MEMS) gyroscope sensor has a sensing mass and a quadrature error compensation control loop for applying a force to the sensing mass to cancel quadrature error. To detect fault, the quadrature error compensation control loop is opened and an additional force is applied to produce a physical displacement of the sensing mass. A quadrature error resulting from the physical displacement of the sensing mass in response to the applied additional force is sensed. The sensed quadrature error is compared to an expected value corresponding to the applied additional force and a fault alert is generated if the comparison is not satisfied.

    MEMS gyroscope control circuit
    10.
    发明授权
    MEMS gyroscope control circuit 有权

    公开(公告)号：US11662205B2

    公开(公告)日：2023-05-30

    申请号：US17504994

    申请日：2021-10-19

    Applicant: STMicroelectronics, Inc.

    Inventor： Deyou Fang ,  Chao-Ming Tsai ,  Milad Alwardi ,  Yamu Hu ,  David McClure

    IPC: G01C19/5726 ,  G01C25/00 ,  G01C19/5733

    CPC classification number: G01C19/5726 ,  G01C19/5733 ,  G01C25/005

    Abstract: A microelectromechanical system (MEMS) gyroscope includes a driving mass and a driving circuit that operates to drive the driving mass in a mechanical oscillation at a resonant drive frequency. An oscillator generates a system clock that is independent of and asynchronous to the resonant drive frequency. A clock generator circuit outputs a first clock and a second clock that are derived from the system clock. The drive loop of the driving circuit including an analog-to-digital converter (ADC) circuit that is clocked by the first clock and a digital signal processing (DSP) circuit that is clocked by the second clock.

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