- 专利标题: Three-dimensional nanoribbon-based dynamic random-access memory
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申请号: US16691163申请日: 2019-11-21
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公开(公告)号: US11257822B2公开(公告)日: 2022-02-22
- 发明人: Wilfred Gomes , Kinyip Phoa , Mauro J. Kobrinsky , Tahir Ghani , Uygar E. Avci , Rajesh Kumar
- 申请人: Intel Corporation
- 申请人地址: US CA Santa Clara
- 专利权人: Intel Corporation
- 当前专利权人: Intel Corporation
- 当前专利权人地址: US CA Santa Clara
- 代理机构: Patent Capital Group
- 主分类号: H01L27/108
- IPC分类号: H01L27/108 ; H01L29/78 ; H01L49/02 ; H01L29/06 ; H01L29/423 ; H01L29/49 ; H01L29/51 ; H01L29/786
摘要:
Described herein are IC devices that include semiconductor nanoribbons stacked over one another to realize high-density three-dimensional (3D) dynamic random-access memory (DRAM). An example device includes a first semiconductor nanoribbon, a second semiconductor nanoribbon, a first source or drain (S/D) region and a second S/D region in each of the first and second nanoribbons, a first gate stack at least partially surrounding a portion of the first nanoribbon between the first and second S/D regions in the first nanoribbon, and a second gate stack, not electrically coupled to the first gate stack, at least partially surrounding a portion of the second nanoribbon between the first and second S/D regions in the second nanoribbon. The device further includes a bitline coupled to the first S/D regions of both the first and second nanoribbons.
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