- 专利标题: Polishing method and polishing apparatus
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申请号: US16166946申请日: 2018-10-22
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公开(公告)号: US11260496B2公开(公告)日: 2022-03-01
- 发明人: Keita Yagi , Yuki Watanabe , Toshimitsu Sasaki
- 申请人: EBARA CORPORATION
- 申请人地址: JP Tokyo
- 专利权人: EBARA CORPORATION
- 当前专利权人: EBARA CORPORATION
- 当前专利权人地址: JP Tokyo
- 代理机构: BakerHostetler
- 优先权: JP2017-205400 20171024
- 主分类号: B24B37/013
- IPC分类号: B24B37/013 ; B24B49/16 ; B24B49/10 ; B24B37/04
摘要:
A polishing method which can acquire an actual position of a film-thickness measurement point, and can therefore apply an optimum polishing pressure to a substrate such as a wafer is disclosed. The method includes: causing a substrate detection sensor to generate substrate detection signals in a preset cycle and causing a film-thickness sensor to generate a film-thickness signal at a predetermined measurement point during polishing of the substrate while the substrate detection sensor and the film-thickness sensor are moving across the surface of the substrate; calculating an angle of eccentricity of a center of the substrate relative to a center of the polishing head from the number of substrate detection signals; correcting a position of the predetermined measurement point based on the angle of eccentricity; and controlling polishing pressure at which the polishing head presses the substrate based on the film-thickness signal and the corrected position of the predetermined measurement point.
公开/授权文献
- US20190118333A1 POLISHING METHOD AND POLISHING APPARATUS 公开/授权日:2019-04-25
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