Invention Grant
- Patent Title: Methods for micro and nano fabrication by selective template removal
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Application No.: US16084214Application Date: 2018-05-02
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Publication No.: US11261085B2Publication Date: 2022-03-01
- Inventor: Mohsen Keshavarz Akhlaghi , Clinton K. Landrock
- Applicant: NANOTECH SECURITY CORP.
- Applicant Address: CA Burnaby
- Assignee: NANOTECH SECURITY CORP.
- Current Assignee: NANOTECH SECURITY CORP.
- Current Assignee Address: CA Burnaby
- Agency: Fish & Richardson P.C.
- International Application: PCT/CA2018/050519 WO 20180502
- International Announcement: WO2018/201248 WO 20181108
- Main IPC: B81C99/00
- IPC: B81C99/00 ; B29C41/02 ; B82B3/00 ; B81C1/00 ; H01L31/0224 ; G02B5/18 ; B82Y40/00 ; B42D25/36 ; B42D25/40

Abstract:
A method to remove selected parts of a thin-film material otherwise uniformly deposited over a template is disclosed. The methods rely on a suitable potting material to encapsulate and snatch the deposited material on apexes of the template. The process may yield one and/or two devices during a single process step: (i) thin-film material(s) with micro- and/or nano-perforations defined by the shape of template apexes, and (ii) micro- and/or nano-particles shaped and positioned in the potting material by the design of the template apexes. The devices made from this method may find applications in fabrication of mechanical, chemical, electrical and optical devices.
Public/Granted literature
- US20190292047A1 METHODS FOR MICRO AND NANO FABRICATION BY SELECTIVE TEMPLATE REMOVAL Public/Granted day:2019-09-26
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