Invention Grant
- Patent Title: MEMS device and electronic apparatus
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Application No.: US16078213Application Date: 2016-06-02
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Publication No.: US11262376B2Publication Date: 2022-03-01
- Inventor: Quanbo Zou
- Applicant: GOERTEK INC.
- Applicant Address: CN Weifang
- Assignee: GOERTEK INC.
- Current Assignee: GOERTEK INC.
- Current Assignee Address: CN Weifang
- Agency: Saliwanchik, Lloyd & Eisenschenk
- International Application: PCT/CN2016/084544 WO 20160602
- International Announcement: WO2017/206149 WO 20171207
- Main IPC: G01P3/36
- IPC: G01P3/36 ; G01P15/093 ; B81B5/00 ; B81C1/00
Abstract:
The present invention discloses a MEMS device and electronic apparatus. The MEMS device comprises: a micro-LED; and a movable member, wherein the micro-LED is mounted on the movable member and is configured for moving with the movable member. According to an embodiment of this invention, the signal detection of a MEMS device can be simplified and/or the contents of signals produced by the MEMS device can be enriched.
Public/Granted literature
- US20190079110A1 MEMS DEVICE AND ELECTRONIC APPARATUS Public/Granted day:2019-03-14
Information query
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