Invention Grant
- Patent Title: Spatial control of vapor condensation using convection
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Application No.: US14643887Application Date: 2015-03-10
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Publication No.: US11267012B2Publication Date: 2022-03-08
- Inventor: Gregory McGraw , William E. Quinn , Matthew King , Elliot H. Hartford, Jr. , Siddharth Harikrishna Mohan
- Applicant: Universal Display Corporation
- Applicant Address: US NJ Ewing
- Assignee: Universal Display Corporation
- Current Assignee: Universal Display Corporation
- Current Assignee Address: US NJ Ewing
- Agency: Butzel Long
- Main IPC: B05B12/18
- IPC: B05B12/18 ; C23C14/22 ; C23C14/04 ; C23C14/12

Abstract:
Embodiments of the disclosed subject matter provide a device including a nozzle, a source of material to be deposited on a substrate in fluid communication with the nozzle, a delivery gas source in fluid communication with the source of material to be deposited with the nozzle, an exhaust channel disposed adjacent to the nozzle, and a confinement gas source in fluid communication with the nozzle and the exhaust channel, and disposed adjacent to the exhaust channel.
Public/Granted literature
- US20150376787A1 SPATIAL CONTROL OF VAPOR CONDENSATION USING CONVECTION Public/Granted day:2015-12-31
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