Invention Grant
- Patent Title: Accelerometer sensitivity self-calibration with duty cycle control of drive signal
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Application No.: US16876777Application Date: 2020-05-18
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Publication No.: US11268975B2Publication Date: 2022-03-08
- Inventor: Michele Folz , Giacomo Laghi
- Applicant: INVENSENSE, INC.
- Applicant Address: US CA San Jose
- Assignee: INVENSENSE, INC.
- Current Assignee: INVENSENSE, INC.
- Current Assignee Address: US CA San Jose
- Agency: Haley Guiliano LLP
- Agent Stefan D. Osterbur
- Main IPC: G01P15/08
- IPC: G01P15/08 ; G01P15/125

Abstract:
A MEMS accelerometer includes at least one proof mass and two or more drive electrodes associated with each proof mass. Self-test signals are applied to the drive electrodes. The self-test signals have a signal pattern that includes different duty cycles being applied to the drive electrodes simultaneously, which in turn imparts an electrostatic force on the proof mass. The response of the proof mass to the electrostatic force is measured to determine a sensitivity of the MEMS accelerometer.
Public/Granted literature
- US20210190813A1 ACCELEROMETER SENSITIVITY SELF-CALIBRATION WITH DUTY CYCLE CONTROL OF DRIVE SIGNAL Public/Granted day:2021-06-24
Information query
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