- 专利标题: Substrate processing apparatus
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申请号: US15634871申请日: 2017-06-27
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公开(公告)号: US11270904B2公开(公告)日: 2022-03-08
- 发明人: Vincent W. Tsang , Charles W. Su
- 申请人: BROOKS AUTOMATION, INC.
- 申请人地址: US MA Chelmsford
- 专利权人: BROOKS AUTOMATION, INC.
- 当前专利权人: BROOKS AUTOMATION, INC.
- 当前专利权人地址: US MA Chelmsford
- 代理机构: Perman & Green, LLP
- 代理商 Colin C. Durham
- 主分类号: H01L21/67
- IPC分类号: H01L21/67 ; H01L21/687 ; H01L21/677 ; B25J9/10 ; B25J9/04 ; B25J9/16
摘要:
A substrate processing apparatus including a frame, a first SCARA arm having an end effector and being configured to extend and retract along a first axis, a second SCARA arm having an end effector and being configured to extend and retract along a second axis, a drive section including a splitting drive pulley rotatably mounted to rotate at an axis of rotation of the drive section that is shared by the first and second SCARA arms, the splitting drive pulley being coupled to at least two idler pulleys by respective segmented transmission loops of separate band segments so that the splitting drive pulley is a common pulley splitting one degree of freedom of the drive section between the at least two idler pulleys so as to commonly drive the at least two idler pulleys, wherein at least one band of each respective transmission loop share a common band interface level.
公开/授权文献
- US20180019155A1 SUBSTRATE PROCESSING APPARATUS 公开/授权日:2018-01-18
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