Invention Grant
- Patent Title: Interconnections for 3D memory
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Application No.: US16921206Application Date: 2020-07-06
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Publication No.: US11276437B2Publication Date: 2022-03-15
- Inventor: Toru Tanzawa
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Brooks, Cameron & Huebcsh, PLLC
- Main IPC: G11C16/04
- IPC: G11C16/04 ; G11C5/06 ; G11C16/10 ; H01L27/11524 ; H01L27/11551 ; H01L27/11529 ; G11C16/26 ; G11C5/02 ; G11C7/12 ; G11C7/22 ; G11C16/16 ; G11C16/08

Abstract:
Apparatuses and methods for interconnections for 3D memory are provided. One example apparatus can include a stack of materials including a plurality of pairs of materials, each pair of materials including a conductive line formed over an insulation material. The stack of materials has a stair step structure formed at one edge extending in a first direction. Each stair step includes one of the pairs of materials. A first interconnection is coupled to the conductive line of a stair step, the first interconnection extending in a second direction substantially perpendicular to a first surface of the stair step.
Public/Granted literature
- US20210020204A1 INTERCONNECTIONS FOR 3D MEMORY Public/Granted day:2021-01-21
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