Invention Grant
- Patent Title: Vertical memory devices and methods of manufacturing the same
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Application No.: US15930867Application Date: 2020-05-13
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Publication No.: US11276706B2Publication Date: 2022-03-15
- Inventor: Geunwon Lim , Yoonhwan Son , Junyoung Choi
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR Suwon-si
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Suwon-si
- Agency: Myers Bigel, P.A.
- Priority: KR10-2019-0089420 20190724
- Main IPC: H01L27/11582
- IPC: H01L27/11582 ; H01L29/51 ; H01L21/28 ; H01L27/11565

Abstract:
Vertical memory devices and method of manufacturing the same are disclosed. The vertical memory device includes a substrate having a cell block area, a block separation area and a boundary area, a plurality of stack structures arranged in the cell block area and the boundary area such that insulation interlayer patterns are stacked on the substrate alternately with the electrode patterns. The stack structures are spaced apart by the block separation area in the third direction. A plurality of channel structures extend through the stack structures to the substrate in the cell block area in the first direction and are connected to the substrate. A plurality of dummy channel structures extend through upper portions of each of the stack structures in the boundary area and are connected to a dummy bottom electrode pattern spaced apart from the substrate. The bridge defect is thus substantially prevented near the substrate.
Public/Granted literature
- US20210028186A1 VERTICAL MEMORY DEVICES AND METHODS OF MANUFACTURING THE SAME Public/Granted day:2021-01-28
Information query
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