A method and apparatus for pasteurizing and drying cannabis plant materials using a microwave-vacuum chamber. The pasteurizing and drying are carried out with no use of ionizing radiation and with rapid drying. Pasteurization is done at a temperature and for a time period that are sufficient to reduce microorganisms to an acceptably low level, while not significantly reducing the psychoactive compounds in the material. In the process, the pressure inside a vacuum chamber is reduced to a first pressure less than atmospheric. The material is maintained in the vacuum chamber at the first pressure at a pasteurizing temperature while irradiating the material with microwave radiation. The pressure is then reduced to a second pressure lower than the first pressure and the material is maintained in the vacuum chamber at the second pressure for a time period at a dehydrating temperature lower than the pasteurizing temperature while irradiating the material with microwave radiation. The pasteurizing and dehydrating steps can be done in the reverse order.