Continuous calibration of accelerometer sensitivity by proof-mass dithering
Abstract:
An in-situ test calibration system and method are disclosed where a perpetual out-of-band electrostatic force induced excitation is used to dither the proof-mass of a MEMS based accelerometer where the amount of deflection change is proportional to sensitivity changes. The supplier of the accelerometer would exercise the accelerometer in a calibration station to determine initial sensitivity values. After the calibration and before removing the accelerometer from the calibration station, the supplier would start the dither and calibrate the acceleration equivalent force (FG) to drive voltage transfer function (FG/V). After installation of the accelerometer into a system or sometime later in the field, any changes in the FG/V transfer function due to changes in the sensitivity are observable and can be used for re-calibrating the accelerometer.
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