Invention Grant
- Patent Title: Continuous calibration of accelerometer sensitivity by proof-mass dithering
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Application No.: US16145153Application Date: 2018-09-27
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Publication No.: US11287442B2Publication Date: 2022-03-29
- Inventor: Wesley S. Smith , Christopher C. Painter , See-Ho Tsang
- Applicant: Apple Inc.
- Applicant Address: US CA Cupertino
- Assignee: Apple Inc.
- Current Assignee: Apple Inc.
- Current Assignee Address: US CA Cupertino
- Agency: Fish & Richardson P.C.
- Main IPC: G01P15/125
- IPC: G01P15/125 ; G01P21/00 ; G01P15/08

Abstract:
An in-situ test calibration system and method are disclosed where a perpetual out-of-band electrostatic force induced excitation is used to dither the proof-mass of a MEMS based accelerometer where the amount of deflection change is proportional to sensitivity changes. The supplier of the accelerometer would exercise the accelerometer in a calibration station to determine initial sensitivity values. After the calibration and before removing the accelerometer from the calibration station, the supplier would start the dither and calibrate the acceleration equivalent force (FG) to drive voltage transfer function (FG/V). After installation of the accelerometer into a system or sometime later in the field, any changes in the FG/V transfer function due to changes in the sensitivity are observable and can be used for re-calibrating the accelerometer.
Public/Granted literature
- US20190277877A1 CONTINUOUS CALIBRATION OF ACCELEROMETER SENSITIVITY BY PROOF-MASS DITHERING Public/Granted day:2019-09-12
Information query
IPC分类: