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    DRIVE SIGNAL CONTROL FOR RESONATING ELEMENTS
    1.
    发明申请
    DRIVE SIGNAL CONTROL FOR RESONATING ELEMENTS 有权

    公开(公告)号：US20170089701A1

    公开(公告)日：2017-03-30

    申请号：US14866561

    申请日：2015-09-25

    Applicant: Apple Inc.

    Inventor： Gregory B. Arndt ,  Christopher C. Painter

    IPC: G01C19/567 ,  G01N29/12

    CPC classification number: G01C19/567 ,  G01C19/5776 ,  H03L1/00

    Abstract: In some implementations, a control system for a resonating element comprises: a resonating element being driven by an oscillating drive signal and configured to generate a sense signal proportional to an amplitude of motion; a phase comparator coupled to the resonating element and to an oscillating drive signal, the phase comparator configured to compare the sense signal and the oscillating drive signal and to generate an error signal proportional to the phase difference; an oscillator coupled to the phase comparator and configured for generating the oscillating drive signal, the oscillator configured to receive the error signal and to adjust a phase of the oscillating signal based on the error signal; and an automatic gain control coupled to the resonating element and the oscillator, the automatic gain control configured to adjust the gain of the oscillating drive signal based on the signal generated by the resonating element.

    Strain Reduction and Sensing on Package Substrates
    2.
    发明申请
    Strain Reduction and Sensing on Package Substrates 审中-公开
    封装衬底上的应变减少和感应

    公开(公告)号：US20170057810A1

    公开(公告)日：2017-03-02

    申请号：US15253711

    申请日：2016-08-31

    Applicant: Apple Inc.

    Inventor： Krishna Prasad Vummidi Murali ,  Christopher C. Painter ,  Kuan-Lin Chen

    IPC: B81B7/00 ,  B81C1/00

    CPC classification number: B81B7/0048 ,  B81B7/008 ,  B81B7/0087 ,  B81B2203/0109 ,  B81B2203/0127 ,  B81B2203/0163 ,  B81B2207/012 ,  B81B2207/096 ,  B81C1/00325 ,  B81C2203/0792

    Abstract: A strain measurement platform that comprises of a strain die that can be embedded inside a package substrate or have its own substrate with through silicon vias (TSVs) is disclosed. The strain die comprises a body and a base. The base is coupled to the body with strain enhancing structures. Strain enhancing structures are formed on the strain die to amplify the strain signals locally, while also acting as strain and vibration isolators. Strain sensors are formed on or around the strain enhancing structures at locations of maximum strain. The strain sensors can be piezo-resistors, piezo-junctions or piezo-electrics. Strain enhancing structures are implemented either as compliant springs or as a thin membrane over which the base is suspended. A package stack can be mounted on top of the strain die and electrically connected to a strain measuring platform. Some example process flows for fabricating strain die are also disclosed.

    Abstract translation: 公开了一种应变测量平台，其包括可嵌入封装衬底内的应变模具或具有通过硅通孔（TSV）的自己的衬底。 应变模具包括主体和基部。 基座通过应变增强结构与身体联接。 在应变模具上形成应变增强结构以局部放大应变信号，同时也用作应变和振动隔离器。 应变传感器形成在应变增强结构的最大应变位置处或周围。 应变传感器可以是压电电阻器，压电接头或压电电阻器。 应变增强结构可以作为柔性弹簧或作为悬挂基座的薄膜来实现。 包装堆叠可以安装在应变模具的顶部上并电连接到应变测量平台。 还公开了用于制造应变模的一些示例性工艺流程。

    MEMS sensor with dual pendulous proof masses
    5.
    发明授权
    MEMS sensor with dual pendulous proof masses 有权

    公开(公告)号：US10759656B2

    公开(公告)日：2020-09-01

    申请号：US15721643

    申请日：2017-09-29

    Applicant: Apple Inc.

    Inventor： Christopher C. Painter ,  Te Hsi Lee

    IPC: G01P15/125 ,  G01P15/08 ,  B81B3/00

    Abstract: A MEMS sensor is disclosed that includes dual pendulous proof masses comprised of sections of different thickness to allow simultaneous suppression of vertical and lateral thermal gradient-induced offsets in a MEMS sensor while still allowing for the normal operation of the accelerometer. In an embodiment, the structure and different sections of the MEMS sensor is realized using multiple polysilicon layers. In other embodiments, the structure and different thickness sections may be realized with other materials and processes. For example, plating, etching, or silicon-on-nothing (SON) processing.

    DUTY-CYCLED PHASE SHIFTER FOR ANGULAR RATE SENSOR
    6.
    发明申请
    DUTY-CYCLED PHASE SHIFTER FOR ANGULAR RATE SENSOR 审中-公开

    公开(公告)号：US20180080769A1

    公开(公告)日：2018-03-22

    申请号：US15692164

    申请日：2017-08-31

    Applicant: Apple Inc.

    Inventor： Gregory B. Arndt ,  Christopher C. Painter

    IPC: G01C19/5776 ,  H03L7/081

    Abstract: An architecture is disclosed for an angular rate sensor that includes a duty-cycled phase shifter for generating a clock with high resolution delay for use in synchronized demodulation of a sensor output signal. In an embodiment, a sensor comprises: a mechanical resonator; a drive circuit coupled to the mechanical resonator and operable to actuate the mechanical resonator into resonant vibration; a sense circuit mechanically coupled to the mechanical resonator, the sense circuit operable to generate a sense signal having an in-phase signal component and a quadrature signal component; a demodulator circuit operable to receive the sense signal and a first clock for demodulating the sense signal to separate the in-phase signal component from the quadrature signal component; and a duty-cycled phase shifter coupled to the demodulator, the duty-cycled phase shifter operable to generate the first clock.

    CONTINUOUS CALIBRATION OF ACCELEROMETER SENSITIVITY BY PROOF-MASS DITHERING
    7.
    发明申请
    CONTINUOUS CALIBRATION OF ACCELEROMETER SENSITIVITY BY PROOF-MASS DITHERING 审中-公开

    公开(公告)号：US20190277877A1

    公开(公告)日：2019-09-12

    申请号：US16145153

    申请日：2018-09-27

    Applicant: Apple Inc.

    Inventor： Wesley S. Smith ,  Christopher C. Painter ,  See-Ho Tsang

    IPC: G01P15/125 ,  G01P21/00 ,  G01P15/08

    Abstract: An in-situ test calibration system and method are disclosed where a perpetual out-of-band electrostatic force induced excitation is used to dither the proof-mass of a MEMS based accelerometer where the amount of deflection change is proportional to sensitivity changes. The supplier of the accelerometer would exercise the accelerometer in a calibration station to determine initial sensitivity values. After the calibration and before removing the accelerometer from the calibration station, the supplier would start the dither and calibrate the acceleration equivalent force (FG) to drive voltage transfer function (FG/V). After installation of the accelerometer into a system or sometime later in the field, any changes in the FG/V transfer function due to changes in the sensitivity are observable and can be used for re-calibrating the accelerometer.

    Multi-Stage MEMS Accelerometer for Mixed G-Level Operation
    8.
    发明申请
    Multi-Stage MEMS Accelerometer for Mixed G-Level Operation 审中-公开

    公开(公告)号：US20190187170A1

    公开(公告)日：2019-06-20

    申请号：US15849542

    申请日：2017-12-20

    Applicant: Apple Inc.

    Inventor： Christopher C. Painter ,  See-Ho Tsang

    IPC: G01P15/125 ,  G01P15/08

    Abstract: A multi-stage MEMS accelerometer is disclosed that includes a MEMS sensor that has two suspended structures (proof masses) suspended by suspension members. The suspended structures move together in response to input acceleration when less the acceleration is less than a threshold value. When the input acceleration is greater than the threshold value, one of the suspended structures makes contact with a mechanical stop while the other suspended structure continues to move with increased stiffness due to the combined stiffness of the suspension members. The contact with the mechanical stop contributes a nonlinear mechanical stiffening effect that counteracts the nonlinear capacitive effect inherent in capacitive based MEMS accelerometers. In some embodiments, more than two suspended structures can be used to allow for optimization of sensitivity for multiple full-scale ranges, and for higher fidelity tuning of mechanical sensitivity with nonlinear capacitance. In some embodiments, compliant mechanical stops are used.

    System for freeing stuck accelerometers
    10.
    发明授权
    System for freeing stuck accelerometers 有权

    公开(公告)号：US11346855B2

    公开(公告)日：2022-05-31

    申请号：US17033563

    申请日：2020-09-25

    Applicant: Apple Inc.

    Inventor： Qinghung Lee ,  Christopher C. Painter

    IPC: G01P21/00 ,  G01P1/02 ,  G01P15/125 ,  H04W88/02

    Abstract: According to some aspects of the subject technology, an apparatus includes an accelerometer including one or more sense electrodes to sense an input acceleration, and an unstick device to free the accelerometer from a stuck state due to a saturating acceleration input. The unstick device includes at least one unstick electrode and a control circuitry to cause the unstick electrode to generate vibrational energy to free the accelerometer.

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