Invention Grant
- Patent Title: Three-dimensional memory die containing stress-compensating slit trench structures and methods for making the same
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Application No.: US16594892Application Date: 2019-10-07
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Publication No.: US11289429B2Publication Date: 2022-03-29
- Inventor: Kazuma Shimamoto
- Applicant: SANDISK TECHNOLOGIES LLC
- Applicant Address: US TX Addison
- Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee Address: US TX Addison
- Agency: The Marbury Law Group PLLC
- Main IPC: H01L27/11573
- IPC: H01L27/11573 ; H01L23/00 ; H01L27/11519 ; H01L27/11524 ; H01L27/11529 ; H01L27/11582 ; H01L27/11565 ; H01L27/1157 ; H01L27/11556

Abstract:
A vertically alternating sequence of continuous insulating layers and continuous sacrificial material layers is formed over a substrate. Memory stack structures are formed through the vertically alternating sequence. Divider trenches and slit trenches are formed such that the divider trenches laterally extend along a first horizontal direction and divide the vertically alternating sequence into a plurality of alternating stacks of insulating layers and sacrificial material layers, and the slit trenches laterally extend along a second horizontal direction that is perpendicular to the first horizontal direction. The sacrificial material layers are replaced with electrically conductive layers employing the divider trenches as a conduit for an etchant and for a reactant. Each of the divider trenches and the slit trenches are filled with material portions to provide a plurality of divider trench fill structures in the divider trenches and to provide a plurality of slit trench fill structures in the slit trenches.
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