Invention Grant
- Patent Title: Semiconductor memory device
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Application No.: US16801336Application Date: 2020-02-26
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Publication No.: US11289505B2Publication Date: 2022-03-29
- Inventor: Naoya Yoshimura , Keisuke Nakatsuka
- Applicant: KIOXIA CORPORATION
- Applicant Address: JP Tokyo
- Assignee: KIOXIA CORPORATION
- Current Assignee: KIOXIA CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Foley & Lardner LLP
- Priority: JPJP2019-133747 20190719
- Main IPC: H01L27/11582
- IPC: H01L27/11582 ; G11C7/18 ; G11C8/14 ; H01L27/1157 ; H01L27/11524 ; H01L27/11556 ; H01L27/11565 ; H01L27/11519

Abstract:
A semiconductor memory device according to an embodiment includes a substrate, first to eleventh conductive layers, first and second pillars, and first to fourth insulating regions. The first insulating regions are provided between the third and fifth conductive layers and between the fourth and sixth conductive layers. The second insulating regions are provided between the eighth and tenth conductive layers and between the ninth and eleventh conductive layers. The third insulating region is provided between the third to sixth conductive layers and the eighth to eleventh conductive layers. The fourth insulating region is provided between the second and seventh conductive layers. The fourth insulating region is separated from the third insulating region in a planar view.
Public/Granted literature
- US20210020655A1 SEMICONDUCTOR MEMORY DEVICE Public/Granted day:2021-01-21
Information query
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