- 专利标题: Microphone MEMS diaphragm and self-test thereof
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申请号: US17158983申请日: 2021-01-26
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公开(公告)号: US11290810B1公开(公告)日: 2022-03-29
- 发明人: Marek Matej , Stefano Riva
- 申请人: InvenSense, Inc.
- 申请人地址: US CA San Jose
- 专利权人: InvenSense, Inc.
- 当前专利权人: InvenSense, Inc.
- 当前专利权人地址: US CA San Jose
- 主分类号: H04R1/32
- IPC分类号: H04R1/32 ; H04R7/02 ; B81B3/00
摘要:
A device includes a micro-electromechanical system (MEMS) element configured to sense acoustic signals. The device also includes a circuitry configured to enable the microphone element to sense the acoustic signals. The circuitry is further configured to disable the microphone element to prevent the microphone element to sense the acoustic signals. It is appreciated that the circuitry is further configured to apply a test signal to the MEMS element when the microphone element is disabled. The microphone element outputs a signal in response to the test signal to the circuitry. The circuitry in response to the output signal with a first value determines that a diaphragm of the MEMS element is nonoperational and the circuitry in response to the output signal with a second value determines that the diaphragm of the MEMS element is operational.
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