公开(公告)号：US11632639B2

公开(公告)日：2023-04-18

申请号：US17681349

申请日：2022-02-25

Applicant: InvenSense, Inc.

Inventor： Marek Matej ,  Stefano Riva

IPC: H04R29/00 ,  H04R3/00 ,  B81B3/00

Abstract: A device includes a micro-electromechanical system (MEMS) element configured to sense acoustic signals. The device also includes a circuitry configured to enable the microphone element to sense the acoustic signals. The circuitry is further configured to disable the microphone element to prevent the microphone element to sense the acoustic signals. It is appreciated that the circuitry is further configured to apply a test signal to the MEMS element when the microphone element is disabled. The microphone element outputs a signal in response to the test signal to the circuitry. The circuitry in response to the output signal with a first value determines that a diaphragm of the MEMS element is nonoperational and the circuitry in response to the output signal with a second value determines that the diaphragm of the MEMS element is operational.

公开(公告)号：US20220240035A1

公开(公告)日：2022-07-28

申请号：US17681349

申请日：2022-02-25

Applicant: InvenSense, Inc.

Inventor： Marek Matej ,  Stefano Riva

IPC: H04R29/00 ,  H04R3/00 ,  B81B3/00

Abstract: A device includes a micro-electromechanical system (MEMS) element configured to sense acoustic signals. The device also includes a circuitry configured to enable the microphone element to sense the acoustic signals. The circuitry is further configured to disable the microphone element to prevent the microphone element to sense the acoustic signals. It is appreciated that the circuitry is further configured to apply a test signal to the MEMS element when the microphone element is disabled. The microphone element outputs a signal in response to the test signal to the circuitry. The circuitry in response to the output signal with a first value determines that a diaphragm of the MEMS element is nonoperational and the circuitry in response to the output signal with a second value determines that the diaphragm of the MEMS element is operational.

公开(公告)号：US10237650B2

公开(公告)日：2019-03-19

申请号：US15614527

申请日：2017-06-05

Applicant: INVENSENSE, INC.

Inventor： Igor Mucha ,  Marek Matej ,  Peter Pracny

IPC: H04R3/02

Abstract: A feedback signal is employed to facilitate enhancing an acoustic overload point and electrostatic discharge protection of a sensor component and associated circuit. The sensor component comprises a backplate component and a diaphragm component. The backplate component is biased to a low-level voltage associated with a ground. The diaphragm component is biased to a defined high-voltage associated with a charge pump. The diaphragm component generates a signal based on movement of the diaphragm component in relation to the backplate component in response to the input signal. A feedback component receives the signal from the diaphragm component and generates an inverted signal based on the signal. The inverted signal or a processed inverted signal, which can be derived from a filter component that filters the inverted signal, is transmitted to the backplate component.

公开(公告)号：US11290810B1

公开(公告)日：2022-03-29

申请号：US17158983

申请日：2021-01-26

Applicant: InvenSense, Inc.

Inventor： Marek Matej ,  Stefano Riva

IPC: H04R1/32 ,  H04R7/02 ,  B81B3/00

Abstract: A device includes a micro-electromechanical system (MEMS) element configured to sense acoustic signals. The device also includes a circuitry configured to enable the microphone element to sense the acoustic signals. The circuitry is further configured to disable the microphone element to prevent the microphone element to sense the acoustic signals. It is appreciated that the circuitry is further configured to apply a test signal to the MEMS element when the microphone element is disabled. The microphone element outputs a signal in response to the test signal to the circuitry. The circuitry in response to the output signal with a first value determines that a diaphragm of the MEMS element is nonoperational and the circuitry in response to the output signal with a second value determines that the diaphragm of the MEMS element is operational.

公开(公告)号：US20180352330A1

公开(公告)日：2018-12-06

申请号：US15614527

申请日：2017-06-05

Applicant: INVENSENSE, INC.

Inventor： Igor Mucha ,  Marek Matej ,  Peter Pracny

IPC: H04R3/02

CPC classification number: H04R3/02 ,  H04R2201/003 ,  H04R2410/03

Abstract: A feedback signal is employed to facilitate enhancing an acoustic overload point and electrostatic discharge protection of a sensor component and associated circuit. The sensor component comprises a backplate component and a diaphragm component. The backplate component is biased to a low-level voltage associated with a ground. The diaphragm component is biased to a defined high-voltage associated with a charge pump. The diaphragm component generates a signal based on movement of the diaphragm component in relation to the backplate component in response to the input signal. A feedback component receives the signal from the diaphragm component and generates an inverted signal based on the signal. The inverted signal or a processed inverted signal, which can be derived from a filter component that filters the inverted signal, is transmitted to the backplate component.