- 专利标题: Probe on carrier architecture for vertical probe arrays
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申请号: US16858976申请日: 2020-04-27
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公开(公告)号: US11293947B2公开(公告)日: 2022-04-05
- 发明人: Mukesh Selvaraj , January Kister
- 申请人: FormFactor, Inc.
- 申请人地址: US CA Livermore
- 专利权人: FormFactor, Inc.
- 当前专利权人: FormFactor, Inc.
- 当前专利权人地址: US CA Livermore
- 代理机构: Lumen Patent Firm
- 主分类号: G01R1/073
- IPC分类号: G01R1/073 ; G01R1/067
摘要:
A probe-on-carrier architecture is provided, where several vertical probes are disposed on each probe carrier and the probe carriers are affixed to the space transformer. Each vertical probe has two flexible members. The first flexible member makes electrical contact to the space transformer. The second flexible member makes temporary electrical contact to the device under test. A mechanical stiffener can be used to deal with the possible lack of flatness and thermal expansion of the space transformer. The mechanical stiffener can be affixed to the space transformer to bring the flatness and thermal expansion of the space transformer to within specifications. Alternatively, the mechanical stiffener can be affixed to the space transformer without trying to bring the flatness and thermal expansion of the space transformer to within specifications.
公开/授权文献
- US20200341030A1 Probe on carrier architecture for vertical probe arrays 公开/授权日:2020-10-29
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