Invention Grant
- Patent Title: Integrated system and method
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Application No.: US16523514Application Date: 2019-07-26
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Publication No.: US11294164B2Publication Date: 2022-04-05
- Inventor: Igor Krivts (Krayvitz) , Yoram Uziel , Albert Mariasin , Nir Merry , Rami Elichai , Zvi Goren
- Applicant: APPLIED MATERIALS ISRAEL LTD.
- Applicant Address: IL Rehovot
- Assignee: APPLIED MATERIALS ISRAEL LTD.
- Current Assignee: APPLIED MATERIALS ISRAEL LTD.
- Current Assignee Address: IL Rehovot
- Agency: Kilpatrick Townsend & Stockton LLP
- Main IPC: G02B21/00
- IPC: G02B21/00 ; G02B21/26
Abstract:
A method and an integrated system. The integrated system can include an optical inspection unit, a charged particle device, an interface unit, and at least one controller.
Public/Granted literature
- US20210026123A1 INTEGRATED SYSTEM AND METHOD Public/Granted day:2021-01-28
Information query
