公开(公告)号：US20210026123A1

公开(公告)日：2021-01-28

申请号：US16523514

申请日：2019-07-26

Applicant: APPLIED MATERIALS ISRAEL LTD.

Inventor： Igor Krivts (Krayvitz) ,  Yoram Uziel ,  Albert Mariasin ,  Nir Merry ,  Rami Elichai ,  Zvi Goren

IPC: G02B21/26 ,  G02B21/00

Abstract: A method and an integrated system. The integrated system can include an optical inspection unit, a charged particle device, an interface unit, and at least one controller.

公开(公告)号：US11294164B2

公开(公告)日：2022-04-05

申请号：US16523514

申请日：2019-07-26

Applicant: APPLIED MATERIALS ISRAEL LTD.

Inventor： Igor Krivts (Krayvitz) ,  Yoram Uziel ,  Albert Mariasin ,  Nir Merry ,  Rami Elichai ,  Zvi Goren

IPC: G02B21/00 ,  G02B21/26

Abstract: A method and an integrated system. The integrated system can include an optical inspection unit, a charged particle device, an interface unit, and at least one controller.