公开(公告)号：US09958670B2

公开(公告)日：2018-05-01

申请号：US15270311

申请日：2016-09-20

Applicant: APPLIED MATERIALS ISRAEL LTD.

Inventor： Ron Naftail ,  Boris Golberg ,  Rami Elichai

IPC: H01J40/14 ,  G02B26/10 ,  G02B27/09 ,  G01N21/95 ,  G01N21/88

CPC classification number: G02B26/10 ,  G01N21/8806 ,  G01N21/9501 ,  G01N2201/105 ,  G02B21/002 ,  G02B27/0966

Abstract: A scanning system that includes an illumination module that is configured to scan, at a first direction, an elongated radiation spot over an object; and a collection module that is configured to (a) collect a collected radiation beam from the object, and (b) optically manipulate the collected radiation beam to provide a counter-scan beam is directed towards a set of detection units and has a focal point that is positioned at a same location regardless of the propagation of the elongated radiation spot along the first direction.

公开(公告)号：US11294164B2

公开(公告)日：2022-04-05

申请号：US16523514

申请日：2019-07-26

Applicant: APPLIED MATERIALS ISRAEL LTD.

Inventor： Igor Krivts (Krayvitz) ,  Yoram Uziel ,  Albert Mariasin ,  Nir Merry ,  Rami Elichai ,  Zvi Goren

IPC: G02B21/00 ,  G02B21/26

Abstract: A method and an integrated system. The integrated system can include an optical inspection unit, a charged particle device, an interface unit, and at least one controller.

公开(公告)号：US20210026123A1

公开(公告)日：2021-01-28

申请号：US16523514

申请日：2019-07-26

Applicant: APPLIED MATERIALS ISRAEL LTD.

Inventor： Igor Krivts (Krayvitz) ,  Yoram Uziel ,  Albert Mariasin ,  Nir Merry ,  Rami Elichai ,  Zvi Goren

IPC: G02B21/26 ,  G02B21/00

Abstract: A method and an integrated system. The integrated system can include an optical inspection unit, a charged particle device, an interface unit, and at least one controller.

公开(公告)号：US20180081166A1

公开(公告)日：2018-03-22

申请号：US15270311

申请日：2016-09-20

Applicant: APPLIED MATERIALS ISRAEL LTD.

Inventor： Ron Naftail ,  Boris Golberg ,  Rami Elichai

IPC: G02B26/10 ,  G02B27/09 ,  G01N21/95 ,  G01N21/88

CPC classification number: G02B26/10 ,  G01N21/8806 ,  G01N21/9501 ,  G01N2201/105 ,  G02B21/002 ,  G02B27/0966

Abstract: A scanning system that includes an illumination module that is configured to scan, at a first direction, an elongated radiation spot over an object; and a collection module that is configured to (a) collect a collected radiation beam from the object, and (b) optically manipulate the collected radiation beam to provide a counter-scan beam is directed towards a set of detection units and has a focal point that is positioned at a same location regardless of the propagation of the elongated radiation spot along the first direction.