Invention Grant
- Patent Title: Semiconductor device and method of fabricating the same
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Application No.: US17140146Application Date: 2021-01-04
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Publication No.: US11296023B2Publication Date: 2022-04-05
- Inventor: Purakh Raj Verma , Ching-Yang Wen , Li Wang , Kai Cheng
- Applicant: UNITED MICROELECTRONICS CORP.
- Applicant Address: TW Hsin-Chu
- Assignee: UNITED MICROELECTRONICS CORP.
- Current Assignee: UNITED MICROELECTRONICS CORP.
- Current Assignee Address: TW Hsin-Chu
- Agent Winston Hsu
- Priority: CN201910284570.0 20190410
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L23/522 ; H01L27/12 ; H01L21/768 ; H01L29/423 ; H01L29/417

Abstract:
A semiconductor device comprises a buried dielectric layer, a first gate structure, a second gate structure, a first source/drain region, a second source/drain region, a front-side metallization, a backside metallization, and conductive contacts. The first gate structure and the second gate structure disposed respectively in the front-side and back side of the dielectric layer, the first source/drain region and the second source/drain region are disposed between the first gate structure and the second gate structures. The front-side metallization is disposed on the front-side of the buried dielectric layer, and the backside metallization is disposed on the backside of the buried dielectric layer. The conductive contacts penetrate the buried dielectric layer and electrically couple the front-side metallization to the backside metallization.
Public/Granted literature
- US20210125921A1 SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING THE SAME Public/Granted day:2021-04-29
Information query
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