- 专利标题: Package-integrated vertical capacitors and methods of assembling same
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申请号: US16737680申请日: 2020-01-08
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公开(公告)号: US11296186B2公开(公告)日: 2022-04-05
- 发明人: Brandon C Marin , Praneeth Akkinepally , Whitney Bryks , Dilan Seneviratne , Frank Truong
- 申请人: Intel Corporation
- 申请人地址: US CA Santa Clara
- 专利权人: Intel Corporation
- 当前专利权人: Intel Corporation
- 当前专利权人地址: US CA Santa Clara
- 代理机构: Schwegman Lundberg & Woessner, P.A.
- 主分类号: H01L23/532
- IPC分类号: H01L23/532 ; H01L49/02 ; H01L21/768 ; H01L23/00
摘要:
Disclosed embodiments include in-recess fabricated vertical capacitor cells, that can be assembled as close to the surface of a semiconductor package substrate as the first-level interconnect surface. The in-recess fabricated vertical capacitor cells are semiconductor package-integrated capacitors. Disclosed embodiments include laminated vertical capacitor cells where a plated through-hole is twice breached to form opposing capacitor plates. The breached, plated through-hole capacitors are semiconductor package-integrated capacitors.
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