Invention Grant
- Patent Title: MEMS frequency-tuning springs
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Application No.: US16577086Application Date: 2019-09-20
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Publication No.: US11296671B2Publication Date: 2022-04-05
- Inventor: Matti Liukku
- Applicant: MURATA MANUFACTURING CO., LTD.
- Applicant Address: JP Nagaokakyo
- Assignee: MURATA MANUFACTURING CO., LTD.
- Current Assignee: MURATA MANUFACTURING CO., LTD.
- Current Assignee Address: JP Nagaokakyo
- Agency: Squire Patton Boggs (US) LLP
- Priority: FI20185801 20180926
- Main IPC: H03H9/02
- IPC: H03H9/02 ; H03H3/007 ; B81B3/00 ; H03H9/24

Abstract:
A microelectromechanical system with at least one partly mobile mass element which is suspended from a fixed support by one or more suspension units. Each suspension unit comprises first springs which extend from the fixed support to the partly mobile mass element, and second springs which also extend from the fixed support to the partly mobile mass element. Each second spring is substantially parallel and adjacent to one first spring. The first springs are electrically isolated from the second springs, and the microelectromechanical system comprises a voltage source configured to apply a frequency tuning voltage between the one or more first springs and the one or more second springs.
Public/Granted literature
- US20200099357A1 MEMS FREQUENCY-TUNING SPRINGS Public/Granted day:2020-03-26
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