Invention Grant
- Patent Title: Microphone
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Application No.: US16640015Application Date: 2018-09-06
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Publication No.: US11297441B2Publication Date: 2022-04-05
- Inventor: Quanbo Zou , Qunwen Leng , Zhe Wang
- Applicant: Goertek, Inc. , Qingdao Research Institute of Beihang University
- Applicant Address: CN Weifang; CN Shangdong
- Assignee: Goertek, Inc.,Qingdao Research Institute of Beihang University
- Current Assignee: Goertek, Inc.,Qingdao Research Institute of Beihang University
- Current Assignee Address: CN Weifang; CN Shangdong
- Agency: Baker Botts L.L.P.
- Priority: CN201810662233.6 20180625
- International Application: PCT/CN2018/104438 WO 20180906
- International Announcement: WO2020/000647 WO 20200102
- Main IPC: H04R19/04
- IPC: H04R19/04 ; H04R19/00 ; H01L43/08

Abstract:
The present disclosure discloses a microphone, comprising: a first substrate, the first substrate having an inner cavity open at one end, wherein the microphone further comprises a vibration diaphragm and at least one cantilever which are provided to the first substrate and suspended above the inner cavity. The cantilever is separated from the vibration diaphragm by a spacing portion, and the vibration diaphragm and the inner cavity of the first substrate define an acoustically sealed cavity; and a detection structure is provided to the vibration diaphragm and the cantilever. The structural design of the cantilever is adopted, so that the space between the vibration diaphragm and the cantilever is open, the airflow can smoothly pass by the cantilever, and further the signal-to-noise ratio of the microphone can be greatly improved.
Public/Granted literature
- US20200236471A1 MICROPHONE Public/Granted day:2020-07-23
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