公开(公告)号：US20200267480A1

公开(公告)日：2020-08-20

申请号：US16640022

申请日：2018-09-06

申请人： Goertek, Inc. ,  Qingdao Research Institute of Beihang University

发明人： Quanbo Zou ,  Qunwen Leng ,  Zhe Wang

IPC分类号： H04R19/04

摘要： An MEMS microphone is provided, comprising a first substrate and a vibration diaphragm supported above the first substrate by a spacing portion, the first substrate, the spacing portion, and the vibration diaphragm enclosing a vacuum chamber, and a static deflection distance of the vibration diaphragm under an atmospheric pressure being less than a distance between the vibration diaphragm and the first substrate, wherein: one of the vibration diaphragm and the first substrate is provided with a magnetic film, and the other one of the vibration diaphragm and the first substrate is provided with a magnetoresistive sensor cooperating with the magnetic film, the magnetoresistive sensor being configured to sense a change in a magnetic field of the magnetic film during a vibration of the vibration diaphragm and output a varying electrical signal.

公开(公告)号：US11297441B2

公开(公告)日：2022-04-05

申请号：US16640015

申请日：2018-09-06

申请人： Goertek, Inc. ,  Qingdao Research Institute of Beihang University

发明人： Quanbo Zou ,  Qunwen Leng ,  Zhe Wang

IPC分类号： H04R19/04 ,  H04R19/00 ,  H01L43/08

摘要： The present disclosure discloses a microphone, comprising: a first substrate, the first substrate having an inner cavity open at one end, wherein the microphone further comprises a vibration diaphragm and at least one cantilever which are provided to the first substrate and suspended above the inner cavity. The cantilever is separated from the vibration diaphragm by a spacing portion, and the vibration diaphragm and the inner cavity of the first substrate define an acoustically sealed cavity; and a detection structure is provided to the vibration diaphragm and the cantilever. The structural design of the cantilever is adopted, so that the space between the vibration diaphragm and the cantilever is open, the airflow can smoothly pass by the cantilever, and further the signal-to-noise ratio of the microphone can be greatly improved.

公开(公告)号：US11102586B2

公开(公告)日：2021-08-24

申请号：US16640022

申请日：2018-09-06

申请人： Goertek, Inc. ,  Qingdao Research Institute of Beihang University

发明人： Quanbo Zou ,  Qunwen Leng ,  Zhe Wang

IPC分类号： H04R19/04

摘要： An MEMS microphone is provided, comprising a first substrate and a vibration diaphragm supported above the first substrate by a spacing portion, the first substrate, the spacing portion, and the vibration diaphragm enclosing a vacuum chamber, and a static deflection distance of the vibration diaphragm under an atmospheric pressure being less than a distance between the vibration diaphragm and the first substrate, wherein: one of the vibration diaphragm and the first substrate is provided with a magnetic film, and the other one of the vibration diaphragm and the first substrate is provided with a magnetoresistive sensor cooperating with the magnetic film, the magnetoresistive sensor being configured to sense a change in a magnetic field of the magnetic film during a vibration of the vibration diaphragm and output a varying electrical signal.

公开(公告)号：US20200236471A1

公开(公告)日：2020-07-23

申请号：US16640015

申请日：2018-09-06

申请人： Goertek Inc. ,  Qingdao Research Institute of Beihang University

发明人： Quanbo Zou ,  Qunwen Leng ,  Zhe Wang

IPC分类号： H04R19/04 ,  H04R19/00

摘要： The present disclosure discloses a microphone, comprising: a first substrate, the first substrate having an inner cavity open at one end, wherein the microphone further comprises a vibration diaphragm and at least one cantilever which are provided to the first substrate and suspended above the inner cavity. The cantilever is separated from the vibration diaphragm by a spacing portion, and the vibration diaphragm and the inner cavity of the first substrate define an acoustically sealed cavity; and a detection structure is provided to the vibration diaphragm and the cantilever. The structural design of the cantilever is adopted, so that the space between the vibration diaphragm and the cantilever is open, the airflow can smoothly pass by the cantilever, and further the signal-to-noise ratio of the microphone can be greatly improved.