- 专利标题: Stable solutions of monoalkyl tin alkoxides and their hydrolysis and condensation products
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申请号: US16446732申请日: 2019-06-20
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公开(公告)号: US11300876B2公开(公告)日: 2022-04-12
- 发明人: Kai Jiang , Stephen T. Meyers , Lauren B. McQuade , Jeremy T. Anderson , Brian J. Cardineau , Benjamin L. Clark , Dominick Smiddy , Margaret Wilson-Moses
- 申请人: Inpria Corporation
- 申请人地址: US OR Corvallis
- 专利权人: Inpria Corporation
- 当前专利权人: Inpria Corporation
- 当前专利权人地址: US OR Corvallis
- 代理机构: Christensen, Fonder, Dardi & Herbert PLLC
- 代理商 Diane E. Bennett; Peter S. Dardi
- 主分类号: G03F7/004
- IPC分类号: G03F7/004 ; G03F7/20 ; G03F7/16
摘要:
Precursor solutions for radiation patternable coatings are formed with an organic solvent and monoalkyl tin trialkoxides in which the water content of the solvent is adjusted to be within 10 percent of a selected value. Generally, the water content of the solvent is adjusted through water addition, although water removal can also be used. In some embodiments, the adjusted water content of the solvent can be from about 250 ppm by weight to about 10,000 ppm by weight. With the appropriate selection of ligands, the adjusted precursor solutions can be stable for at least about 42 days, and in some cases at least 8 months.
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