Invention Grant
- Patent Title: Footing flare pedestal structure
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Application No.: US16744960Application Date: 2020-01-16
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Publication No.: US11302639B2Publication Date: 2022-04-12
- Inventor: Chih-Chao Yang , Baozhen Li , Ashim Dutta
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Scully, Scott, Murphy & Presser, P.C.
- Agent L. Jeffrey Kelly, Esq.
- Main IPC: H01L23/532
- IPC: H01L23/532 ; H01L23/522 ; H01L43/08 ; H01L27/11597 ; H01L45/00 ; H01L43/02 ; H01L43/12 ; H01L27/22 ; H01L27/24

Abstract:
Re-depositing of metal-containing particles of an embedded electrically conductive structure onto sidewalls of an overlying metal-containing structure is alleviated in the present application by providing a pedestal structure between the embedded electrically conductive structure and the metal-containing structure, wherein the pedestal structure has a flared sidewall that extends beyond a perimeter of the embedded electrically conductive structure. Such a pedestal structure (which can be referred to herein as a footing flare pedestal structure) mitigates, and in some embodiments, entirely eliminates, the exposure of the embedded electrically conductive structure during the patterning of metal-containing layers formed atop the embedded electrically conductive structure.
Public/Granted literature
- US20210225774A1 FOOTING FLARE PEDESTAL STRUCTURE Public/Granted day:2021-07-22
Information query
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