Invention Grant
- Patent Title: Cantilever contact probe and corresponding probe head
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Application No.: US16931188Application Date: 2020-07-16
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Publication No.: US11307221B2Publication Date: 2022-04-19
- Inventor: Riccardo Vettori
- Applicant: Technoprobe S.p.A.
- Applicant Address: IT Cernusco Lombardone
- Assignee: Technoprobe S.p.A.
- Current Assignee: Technoprobe S.p.A.
- Current Assignee Address: IT Cernusco Lombardone
- Agency: Seed Intellectual Property Law Group LLP
- Priority: IT102018000001173 20180117
- Main IPC: G01R1/067
- IPC: G01R1/067 ; G01R1/073

Abstract:
A cantilever contact probe includes a shaped probe body included between a descending probe section and an ascending probe section. At least one end portion is formed in the descending probe section, and bent with respect to a longitudinal axis starting from a bending point and ending with a contact tip of the cantilever contact probe that is configured to abut onto a contact pad of a device under test of that wafer. Suitably, the shaped probe body comprises at least one base portion, an upper portion extending, starting from the base portion, along a longitudinal extension axis of the shaped probe body, orthogonally to the reference plane and a top portion, connected to the upper portion and having a greater diameter than a diameter of the upper portion to form a T, the upper portion being the stem of the T and the top portion being the crosspiece of the T.
Public/Granted literature
- US20200348337A1 CANTILEVER CONTACT PROBE AND CORRESPONDING PROBE HEAD Public/Granted day:2020-11-05
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