Probe head for electronic devices and corresponding probe card

    公开(公告)号:US12032003B2

    公开(公告)日:2024-07-09

    申请号:US17591363

    申请日:2022-02-02

    发明人: Roberto Crippa

    IPC分类号: G01R1/073 G01R1/067

    摘要: A probe head for a test equipment of electronic devices comprises a plurality of contact probes inserted in guide holes provided in at least one upper guide and one lower guide, a bending area for the contact probes being defined between the upper and lower guides, each contact probe having at least one first terminal portion which protrudes of a first length from the lower guide and ends with a contact tip (22A) adapted to abut onto a respective contact pad of a device to be tested, as well as a second terminal portion which protrudes of a second length from the upper guide and ends with a contact head adapted to abut onto a contact pad of a board for connecting or interfacing with the test equipment, suitably comprising at least one protection structure projecting from the upper guide in direction of a longitudinal development axis of the contact probes towards the board, the protection structure thus extending in correspondence of the contact heads of the contact probes.

    Testing head having improved frequency properties

    公开(公告)号:US11921133B2

    公开(公告)日:2024-03-05

    申请号:US18329475

    申请日:2023-06-05

    发明人: Flavio Maggioni

    IPC分类号: G01R1/067 G01R1/073

    摘要: A testing head apt to verify the operation of a device under test integrated on a semiconductor wafer includes a plurality of contact elements, each including a body that extends between a first end portion and a second end portion, and a guide provided with a plurality of guide holes apt to house the contact elements. The guide includes a conductive portion that includes and electrically connects the holes of a group of guide holes to each other and is apt to contact a corresponding group of contact elements apt to carry a same type of signal.

    CONTACT PROBE FOR PROBE HEADS OF ELECTRONIC DEVICES

    公开(公告)号:US20230314476A1

    公开(公告)日:2023-10-05

    申请号:US18040336

    申请日:2021-08-03

    发明人: Riccardo VETTORI

    IPC分类号: G01R1/067 G01R1/073

    摘要: A contact probe having a first end portion adapted to abut onto a contact pad of a device under test and a second end portion adapted to abut onto a contact pad of a PCB board of a testing apparatus, as well as a rod-shaped probe body extended between the end portions along a longitudinal development direction is provided with an opening extending along the longitudinal development direction and defines at least one pair of arms in the probe body. Suitably, each arm of the at least one pair of arms has a not constant transversal section, which is perpendicular to the longitudinal development direction, having different areas in correspondence of different points along the probe body and ensures a distribution of the stress along the probe body during bending thereof during testing operation of the device under test performed by means of the contact probe.

    Testing head having improved frequency properties

    公开(公告)号:US11668732B2

    公开(公告)日:2023-06-06

    申请号:US17325783

    申请日:2021-05-20

    发明人: Flavio Maggioni

    IPC分类号: G01R1/073 G01R1/067

    摘要: A testing head apt to verify the operation of a device under test integrated on a semiconductor wafer includes a plurality of contact elements, each including a body that extends between a first end portion and a second end portion, and a guide provided with a plurality of guide holes apt to house the contact elements. The guide includes a conductive portion that includes and electrically connects the holes of a group of guide holes to each other and is apt to contact a corresponding group of contact elements apt to carry a same type of signal.

    Contact probe for a testing head for testing electronic devices

    公开(公告)号:US11307222B2

    公开(公告)日:2022-04-19

    申请号:US16903948

    申请日:2020-06-17

    发明人: Fabio Morgana

    IPC分类号: G01R1/067 G01R1/073 G01R31/26

    摘要: A contact probe for a testing head for testing electronic devices includes a rod-like body made of a first conductive material and extending along a longitudinal axis, and a contact tip supported by the body at an end portion thereof. The contact tip is made of a second conductive material that is different from the first conductive material. The contact tip includes a contact zone configured to perform mechanical and electrical contact with contact pads of a device under test. The body and the contact tip include respective contact surfaces in contact with each other. The contact surfaces are complementary to each other and include respective connection elements engaging each other. The connection elements include a protruding element projecting from the contact surface of one among the body and the contact tip, and a recess made in the other among the body and the contact tip.

    PROBE HEAD FOR A TESTING APPARATUS OF ELECTRONIC DEVICES WITH ENHANCED FILTERING PROPERTIES

    公开(公告)号:US20220034966A1

    公开(公告)日:2022-02-03

    申请号:US17502600

    申请日:2021-10-15

    发明人: Flavio MAGGIONI

    IPC分类号: G01R31/319 G01R1/073 G01R3/00

    摘要: A probe head comprises a plate-shaped support including respective pluralities of guide holes, a plurality of contact probes being slidingly housed in the respective pluralities of guide holes and including at least a first group of contact probes being apt to carry only one type of signal chosen between ground and power supply signals, a conductive portion realized on the support and including a plurality of the guide holes housing the contact probes of the first group, and at least one filtering capacitor having at least one capacitor plate being electrically connected to the conductive portion, the conductive portion electrically connecting the contact probes of the first group.

    Probe card for high-frequency applications

    公开(公告)号:US11029336B2

    公开(公告)日:2021-06-08

    申请号:US16537770

    申请日:2019-08-12

    IPC分类号: G01R1/073 G01R3/00

    摘要: A probe card for a testing apparatus of electronic devices comprises a testing head, which houses a plurality of contact elements extending along a longitudinal axis (H-H) between a first end portion and a second end portion, a support plate, onto which the first end portion is adapted to abut, and a flexible membrane which comprises a first face and a second and opposite face. Conveniently, the first portion of the flexible membrane is arranged on at least one support and comprises a plurality of strips extending between a proximal end and a distal end, the probe card further including a plurality of micro contact probes comprising a body extending along the longitudinal axis (H-H) between a first end portion and a second end portion, the second end portion of each contact element abutting onto the first face of the flexible membrane at the distal end of a respective strip, and the first end portion of each micro contact probe abutting onto the second face of the flexible membrane at a respective contact element, the flexible membrane being electrically connected to the support plate through a second portion thereof, the second end portion of the micro contact probes being apt to contact the contact pads of a device to be tested, wherein the at least one support is provided with a plurality of guide holes for the housing of the plurality of micro contact probes.

    Probe card for an apparatus for testing electronic devices

    公开(公告)号:US09880202B2

    公开(公告)日:2018-01-30

    申请号:US14528774

    申请日:2014-10-30

    摘要: A probe card for an apparatus for testing electronic devices comprises at least one probe head, a plurality of contact probes housed within the probe head, each contact probe having at least one contact tip suitable to abut against contact pads of a device to be tested, a supporting plate of the probe head, an interface plate, a stiffener associating the supporting plate and the interface plate, a plurality of connecting elements with clearance disposed between the supporting plate and the interface plate and housed in a floating manner in a plurality of respective seats made in the supporting plate, and a plurality of connecting elements without clearance disposed between the interface plate and the stiffener.

    Contact probe for a testing head having vertical probes for semiconductor integrated devices
    10.
    发明申请
    Contact probe for a testing head having vertical probes for semiconductor integrated devices 有权
    用于具有用于半导体集成器件的垂直探针的测试头的接触探针

    公开(公告)号:US20050110506A1

    公开(公告)日:2005-05-26

    申请号:US10963985

    申请日:2004-10-12

    IPC分类号: G01R1/067 G01R1/073 G01R31/02

    摘要: A contact probe for a testing head is presented. The contact probe for a testing head has a plurality of these probes which are inserted in guide holes realized in respective dies, the probe comprising a rod-shaped body equipped at an end with at least a contact tip effective to ensure the mechanical and electrical contact with a corresponding contact pad of an integrated electronic device to be tested. The rod-shaped body has a nonuniform cross section.

    摘要翻译: 介绍了一种用于测试头的接触探针。 用于测试头的接触探针具有多个这些探针,其插入到在相应的模具中实现的引导孔中,该探针包括杆端主体,该杆状体至少具有接触尖端,有效地确保机械和电接触 具有要测试的集成电子设备的对应的接触垫。 杆状体具有不均匀的横截面。