Invention Grant
- Patent Title: Synchronization of microelectromechanical system (MEMS) mirrors
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Application No.: US16376544Application Date: 2019-04-05
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Publication No.: US11307403B2Publication Date: 2022-04-19
- Inventor: Norbert Druml , Philipp Greiner , Boris Kirillov , Ievgeniia Maksymova , Maksym Sladkov , Hendrikus Van Lierop
- Applicant: Infineon Technologies AG
- Applicant Address: DE Neubiberg
- Assignee: Infineon Technologies AG
- Current Assignee: Infineon Technologies AG
- Current Assignee Address: DE Neubiberg
- Agency: Design IP
- Main IPC: G02B26/08
- IPC: G02B26/08 ; G01S7/481 ; G02B26/10

Abstract:
A multi-mirror system includes a first mirror configured to oscillate about a first axis; a second mirror configured to oscillate about a second axis; a first driver configured to drive an oscillation of the first mirror, detect first zero-crossing events of the first mirror, and generate a first position signal based on the detected first zero-crossing events; a second driver configured to drive an oscillation of the second mirror, detect second zero-crossing events of the second mirror, and generate a second position signal based on the detected second zero-crossing events; and a synchronization controller configured to receive the first and the second position signals, and synchronize at least one of a phase or a frequency of the oscillation of the second mirror with at least one of a phase or a frequency of the oscillation of the first mirror, respectively, based on the first and the second position signals.
Public/Granted literature
- US20200319450A1 SYNCHRONIZATION OF MICROELECTROMECHANICAL SYSTEM (MEMS) MIRRORS Public/Granted day:2020-10-08
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