Detection, correction, and compensation of coupling effects of microelectromechanical system (MEMS) axes of a two-dimensional scanning structure

    公开(公告)号:US12237840B2

    公开(公告)日:2025-02-25

    申请号:US17403083

    申请日:2021-08-16

    Abstract: An oscillator control system includes an oscillator structure configured to oscillate about first and second rotation axes according to a Lissajous pattern, wherein an oscillation about the second rotation axis imparts a cross-coupling error onto an oscillation about the first rotation axis, and wherein the cross-coupling error changes in accordance with a Lissajous position within the Lissajous pattern; and a driver circuit that includes a phase-locked loop (PLL) configured to regulate a driving signal that drives the oscillation about the first rotation axis. The PLL is configured to generate a PLL signal based on a phase error of the oscillation about the first rotation axis. The PLL includes a compensation circuit configured to receive the PLL signal and the Lissajous position within the Lissajous pattern, apply a compensation value to the PLL signal to generate a compensated PLL signal used for generating the driving signal based on the Lissajous position.

    Synchronization of microelectromechanical system (MEMS) mirrors

    公开(公告)号:US12001010B2

    公开(公告)日:2024-06-04

    申请号:US17690149

    申请日:2022-03-09

    CPC classification number: G02B26/0841 G01S7/4817 G02B26/101

    Abstract: An oscillator system includes an oscillator structure configured to oscillate about a first axis according to a first oscillation and oscillate about a second axis according to a second oscillation; a first driver configured to drive the first oscillation, detect first zero-crossing events of the first mirror, and generate a first position signal based on the detected first zero-crossing events; a second driver configured to drive the second oscillation, detect second zero-crossing events of the second mirror, and generate a second position signal based on the detected second zero-crossing events; and a synchronization controller configured to receive the first and the second position signals, and synchronize at least one of a phase or a frequency of the second oscillation with at least one of a phase or a frequency of the first oscillation, respectively, based on the first and the second position signals.

    Beam steering aware pixel clustering of segmented sensor area and implementing averaging algorithms for pixel processing

    公开(公告)号:US11698447B2

    公开(公告)日:2023-07-11

    申请号:US16931876

    申请日:2020-07-17

    CPC classification number: G01S7/4817 G01S7/4863 G01S17/08

    Abstract: A scanning system includes a scanning structure configured to rotate about at least one first scanning axis; a driver configured to drive the scanning structure about the at least one first scanning axis and detect a position of the scanning structure with respect to the at least one first scanning axis during movement of the scanning structure; a segmented pixel sensor including a plurality of sub-pixel elements arranged in a pixel area; and a controller configured to selectively activate and deactivate the plurality of sub-pixel elements into at least one active cluster and at least one deactivated cluster to form at least one active pixel from the at least one active cluster, receive first position information from the driver indicating the detected position of the scanning structure, and dynamically change a clustering of activated sub-pixel elements and a clustering of deactivated sub-pixel elements based on the first position information.

    Power optimized driving signal switching scheme for oscillating MEMS mirrors

    公开(公告)号:US12044841B2

    公开(公告)日:2024-07-23

    申请号:US17238396

    申请日:2021-04-23

    CPC classification number: G02B26/101 G02B26/0841 H03B5/30

    Abstract: An oscillator driver system includes an oscillator structure and a driver circuit. The oscillator structure includes a rotor terminal configured to receive a rotor voltage and a stator terminal configured to receive a stator voltage, and is driven about a rotation axis according to a voltage difference between the rotor and stator voltages. The driver circuit is configured to generate a driving signal and output the driving signal as the rotor voltage, wherein the driving signal toggles between low and high voltage levels at an actuation frequency to drive the oscillator structure about the rotation axis, and wherein the stator voltage is a fixed voltage. The low and high voltage levels are greater than the stator voltage such that the voltage difference toggles between a low voltage difference and a high voltage difference as the driving signal toggles between the low voltage level and the high voltage level, respectively.

    Synchronization of microelectromechanical system (MEMS) mirrors

    公开(公告)号:US11307403B2

    公开(公告)日:2022-04-19

    申请号:US16376544

    申请日:2019-04-05

    Abstract: A multi-mirror system includes a first mirror configured to oscillate about a first axis; a second mirror configured to oscillate about a second axis; a first driver configured to drive an oscillation of the first mirror, detect first zero-crossing events of the first mirror, and generate a first position signal based on the detected first zero-crossing events; a second driver configured to drive an oscillation of the second mirror, detect second zero-crossing events of the second mirror, and generate a second position signal based on the detected second zero-crossing events; and a synchronization controller configured to receive the first and the second position signals, and synchronize at least one of a phase or a frequency of the oscillation of the second mirror with at least one of a phase or a frequency of the oscillation of the first mirror, respectively, based on the first and the second position signals.

    Packaged MEMS device with disturbance compensation

    公开(公告)号:US10921206B2

    公开(公告)日:2021-02-16

    申请号:US15999017

    申请日:2018-08-20

    Abstract: Disclosed is an apparatus which has, among other things, a MEMS device with a first measurement arrangement for capturing a measurement variable (X1) based on a physical variable, which has a useful variable component (N1) and a first disturbance variable component (Z1), and a second measurement arrangement for capturing a second disturbance variable component (Z2). The apparatus furthermore has a disturbance compensation circuit which is configured to combine the second disturbance variable component (Z2) and the measurement variable (X1) with one another and to obtain a disturbance-compensated measurement variable (Xcomp). The MEMS device is arranged in a housing, wherein the MEMS device is in immediate mechanical contact with the housing by way of at least 50% of a MEMS device surface.

    Capacitive MEMS Sensing Diagnostic Mode

    公开(公告)号:US20240426689A1

    公开(公告)日:2024-12-26

    申请号:US18339532

    申请日:2023-06-22

    Abstract: A pressure sensor includes a microelectromechanical system (MEMS) device having a first pressure sensitive capacitor element, a second pressure sensitive capacitor element, a first reference capacitive element, and a second reference capacitive element arranged in a bridge configuration, a first output pad, and a second output pad; and an application-specific integrated circuit (ASIC) in electrical communication with the MEMS device having a first input pad and a second input pad, a measurement interface including a first input and a second input, a first switch coupled between the first input pad and the second input pad, and a second switch coupled between the second input of the measurement interface and the second input pad of the ASIC.

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